Integration of Self-Powered Triboelectric Phenomena in micro-electro-mechanical systems (MEMS) Sensors

The aim of this project is to pioneer the integration of triboelectric nanogenerator (TENG) principles into Micro-Electro-Mechanical Systems (MEMS) for vibration sensing. The goal will be achieved by meticulously selecting microfabrication methods, designs, and triboelectric materials series. This innovative combination enables MEMS sensors to generate electrical voltage and current as an output from mechanical motions, such as vibrations, in a sustainable and self-powered manner. The project will explore the challenges of miniaturizing TENGs to MEMS dimensions while maintaining high operational efficiency and frequency response. It addresses a critical scientific and technological need, responding to the escalating demand for sustainable, autonomous sensor technologies in vital sectors such as robotics, environmental monitoring, and digital healthcare.