A simple efficient method of nanofilm-on-bulk-substrate thermal conductivity measurement using Raman thermometry

Vladimir Poborchii, Noriyuki Uchida, Yoshinobu Miyazaki, Tetsuya Tada, Pavel I. Geshev, Zhandos N. Utegulov, Alexey Volkov

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In contrast to known Raman-thermometric measurements of thermal conductivity (k) of suspended Si nano-membranes, here we apply Raman thermometry for k measurement of mono- and nano-crystalline Si films on quartz, which is important for applications in thermoelectricity and nanoelectronics. Experimentally, we measure linear dependence of the laser-induced Raman band downshift, which is proportional to the moderate heating ΔT, on the laser power P. Then we convert the downshift to ΔT and determine the ratio ΔT/P. The actual power absorbed by the film is calculated theoretically and controlled experimentally by the reflection/transmission measurement. Then we calculate ΔTcalc/P for arbitrary film k assuming diffusive phonon transport (DPT). Film k is determined from the condition ΔT/P = ΔTcalc/P. We show that this method works well for films with thickness h > Λ where Λ is phonon-mean-free path, even for low-k films like nano-crystalline Si and SiGe. For h < Λ despite ballistic phonon transport contribution, this approach works when the in-plane DPT dominates, e.g. in Si films on quartz with h ≥ 60 nm. We also show that the influence of thermal boundary resistance on the determined k is negligible at this condition. The proposed method is simple and time efficient, as dozen of films can be examined in one hour.

Original languageEnglish
Pages (from-to)137-142
Number of pages6
JournalInternational Journal of Heat and Mass Transfer
Volume123
DOIs
Publication statusPublished - Aug 1 2018

Fingerprint

temperature measurement
Thermal conductivity
thermal conductivity
Substrates
Quartz
quartz
Thermoelectricity
thermoelectricity
Crystalline materials
Nanoelectronics
Lasers
Ballistics
mean free path
ballistics
lasers
membranes
Membranes
Heating
heating

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Cite this

A simple efficient method of nanofilm-on-bulk-substrate thermal conductivity measurement using Raman thermometry. / Poborchii, Vladimir; Uchida, Noriyuki; Miyazaki, Yoshinobu; Tada, Tetsuya; Geshev, Pavel I.; Utegulov, Zhandos N.; Volkov, Alexey.

In: International Journal of Heat and Mass Transfer, Vol. 123, 01.08.2018, p. 137-142.

Research output: Contribution to journalArticle

Poborchii, Vladimir ; Uchida, Noriyuki ; Miyazaki, Yoshinobu ; Tada, Tetsuya ; Geshev, Pavel I. ; Utegulov, Zhandos N. ; Volkov, Alexey. / A simple efficient method of nanofilm-on-bulk-substrate thermal conductivity measurement using Raman thermometry. In: International Journal of Heat and Mass Transfer. 2018 ; Vol. 123. pp. 137-142.
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