Abstract
We report on a time-of-flight mass spectrometric study of laser fluence dependencies in the 532nm ablation of SnO2 targets. At all fluences investigated, SnO and Sn2O2 are the primary neutral gas-phase species. The relative yield of neutral tin-containing species increases exponentially up to a fluence of ∼1.9×108Wcm -2, and saturates at higher fluences. The yield of metal oxide clusters (primarily Sn2O2, Sn4O4) increases in the saturated region, while the yield of bare metal species (primarily Sn, Sn2) decreases. In contrast, the peak kinetic energy of the primary neutral ablated species is insensitive to laser fluence in this range. These results support the hypothesis that the initial Sn:O stoichiometry of amorphous SnOx films grown in vacuum using pulsed laser deposition (PLD) plays an important role in the formation of α-SnO during post-deposition annealing.
| Original language | English |
|---|---|
| Pages (from-to) | 11-17 |
| Number of pages | 7 |
| Journal | International Journal of Mass Spectrometry |
| Volume | 230 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Nov 1 2003 |
| Externally published | Yes |
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Keywords
- Ablation
- Laser
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Spectroscopy
Cite this
A time-of-flight mass spectrometric study of laser fluence dependencies in SnO2 ablation : Implications for pulsed laser deposited tin oxide thin films. / Fan, Haiyan; Ho, Wei; Reid, Scott A.
In: International Journal of Mass Spectrometry, Vol. 230, No. 1, 01.11.2003, p. 11-17.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A time-of-flight mass spectrometric study of laser fluence dependencies in SnO2 ablation
T2 - Implications for pulsed laser deposited tin oxide thin films
AU - Fan, Haiyan
AU - Ho, Wei
AU - Reid, Scott A.
PY - 2003/11/1
Y1 - 2003/11/1
N2 - We report on a time-of-flight mass spectrometric study of laser fluence dependencies in the 532nm ablation of SnO2 targets. At all fluences investigated, SnO and Sn2O2 are the primary neutral gas-phase species. The relative yield of neutral tin-containing species increases exponentially up to a fluence of ∼1.9×108Wcm -2, and saturates at higher fluences. The yield of metal oxide clusters (primarily Sn2O2, Sn4O4) increases in the saturated region, while the yield of bare metal species (primarily Sn, Sn2) decreases. In contrast, the peak kinetic energy of the primary neutral ablated species is insensitive to laser fluence in this range. These results support the hypothesis that the initial Sn:O stoichiometry of amorphous SnOx films grown in vacuum using pulsed laser deposition (PLD) plays an important role in the formation of α-SnO during post-deposition annealing.
AB - We report on a time-of-flight mass spectrometric study of laser fluence dependencies in the 532nm ablation of SnO2 targets. At all fluences investigated, SnO and Sn2O2 are the primary neutral gas-phase species. The relative yield of neutral tin-containing species increases exponentially up to a fluence of ∼1.9×108Wcm -2, and saturates at higher fluences. The yield of metal oxide clusters (primarily Sn2O2, Sn4O4) increases in the saturated region, while the yield of bare metal species (primarily Sn, Sn2) decreases. In contrast, the peak kinetic energy of the primary neutral ablated species is insensitive to laser fluence in this range. These results support the hypothesis that the initial Sn:O stoichiometry of amorphous SnOx films grown in vacuum using pulsed laser deposition (PLD) plays an important role in the formation of α-SnO during post-deposition annealing.
KW - Ablation
KW - Laser
UR - http://www.scopus.com/inward/record.url?scp=0141927443&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0141927443&partnerID=8YFLogxK
U2 - 10.1016/S1387-3806(03)00344-0
DO - 10.1016/S1387-3806(03)00344-0
M3 - Article
VL - 230
SP - 11
EP - 17
JO - International Journal of Mass Spectrometry
JF - International Journal of Mass Spectrometry
SN - 1387-3806
IS - 1
ER -