Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

T. Gladkikh, A. Kozlovskiy, I. Kenzhina, K. Dukenbayev, M. Zdorovets

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The effect of irradiation with C2+ ions on changes in optical and structural properties of AlN-based ceramics has been studied. The choice of C2+ ions is due to the possibility of modeling defects formation in the surface layers, as well as the formation of carbide phases in the structure during irradiation. According to XRD data, the formation of an impurity phase characteristic of the Rhombohedral Al4C3 is observed in the structure of irradiated samples, the presence of which is due to the implantation of carbon ions into the surface layers of not more than 150 nm. The decrease in the intensity of the TSL spectrum for irradiated samples is due to the appearance of defects, as well as an increase in the concentration of impurity atoms. That leads to the substitution of Al and N atoms in the structure. At the irradiation dose of 1015 ion/cm2, there is a sharp increase in the absorption spectrum and the magnitude of the optical absorption.

Original languageEnglish
Pages (from-to)103-110
Number of pages8
JournalVacuum
Volume161
DOIs
Publication statusPublished - Mar 1 2019

Keywords

  • Ceramic materials
  • Crystal surface
  • Heavy ions
  • Hillocks
  • Radiation defects

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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