Characteristics of Ti/Pt/Au ohmic contacts onp-type GaN/AlxGa1-xN superlattices

L. Zhou, F. Khan, A. T. Ping, A. Osinski, I. Adesida

Research output: Contribution to journalArticle

Abstract

Ti/Pt/Au metallization on p-type GaN/AlxGa1-xN (x=0. 10 and 0. 20) superlattices (SL) were investigated as ohmic contacts. Current-voltage and specific contact resistance measurements indicate enhanced p-type doping in the superlattice structures compared to that in GaN. Ti/Pt/Au is shown to be an effective ohmic metallization scheme on p-type GaN/AlxGa1-xN superlattices. A specific contact resistance of Rc = 4. 6×10-4 cm2 is achieved for unalloyed Ti/Pt/Au on GaN/Al0. 2Ga0. 8N SL. This is reduced to 1. 3×10-4 cm2 after annealing for 5 minutes at 300 °C.

Original languageEnglish
JournalMaterials Research Society Symposium - Proceedings
Volume595
Publication statusPublished - 2000
Externally publishedYes

Fingerprint

Ohmic contacts
Superlattices
superlattices
electric contacts
Contact resistance
Metallizing
contact resistance
Doping (additives)
Annealing
annealing
Electric potential
electric potential

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Characteristics of Ti/Pt/Au ohmic contacts onp-type GaN/AlxGa1-xN superlattices. / Zhou, L.; Khan, F.; Ping, A. T.; Osinski, A.; Adesida, I.

In: Materials Research Society Symposium - Proceedings, Vol. 595, 2000.

Research output: Contribution to journalArticle

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AU - Zhou, L.

AU - Khan, F.

AU - Ping, A. T.

AU - Osinski, A.

AU - Adesida, I.

PY - 2000

Y1 - 2000

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AB - Ti/Pt/Au metallization on p-type GaN/AlxGa1-xN (x=0. 10 and 0. 20) superlattices (SL) were investigated as ohmic contacts. Current-voltage and specific contact resistance measurements indicate enhanced p-type doping in the superlattice structures compared to that in GaN. Ti/Pt/Au is shown to be an effective ohmic metallization scheme on p-type GaN/AlxGa1-xN superlattices. A specific contact resistance of Rc = 4. 6×10-4 cm2 is achieved for unalloyed Ti/Pt/Au on GaN/Al0. 2Ga0. 8N SL. This is reduced to 1. 3×10-4 cm2 after annealing for 5 minutes at 300 °C.

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