TY - JOUR
T1 - Computer simulation of surface modification with ion beams
AU - Insepov, Z.
AU - Hassanein, A.
AU - Swenson, D.
AU - Terasawa, M.
N1 - Funding Information:
This work is partially supported by Intel, International Sematech Corporations and the DOE SBIR program.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/12
Y1 - 2005/12
N2 - Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12-54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80-3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
AB - Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12-54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80-3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
KW - Extreme ultra-violet lithography
KW - Gas cluster ion beam
KW - Highly charged ions
KW - Sputtering
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U2 - 10.1016/j.nimb.2005.07.061
DO - 10.1016/j.nimb.2005.07.061
M3 - Article
AN - SCOPUS:28044442705
VL - 241
SP - 496
EP - 500
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-4
ER -