Abstract
Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12-54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80-3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
| Original language | English |
|---|---|
| Pages (from-to) | 496-500 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 241 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - Dec 2005 |
| Externally published | Yes |
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Keywords
- Extreme ultra-violet lithography
- Gas cluster ion beam
- Highly charged ions
- Sputtering
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Computer simulation of surface modification with ion beams. / Insepov, Z.; Hassanein, A.; Swenson, D.; Terasawa, M.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 241, No. 1-4, 12.2005, p. 496-500.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Computer simulation of surface modification with ion beams
AU - Insepov, Z.
AU - Hassanein, A.
AU - Swenson, D.
AU - Terasawa, M.
PY - 2005/12
Y1 - 2005/12
N2 - Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12-54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80-3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
AB - Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12-54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80-3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
KW - Extreme ultra-violet lithography
KW - Gas cluster ion beam
KW - Highly charged ions
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=28044442705&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=28044442705&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2005.07.061
DO - 10.1016/j.nimb.2005.07.061
M3 - Article
VL - 241
SP - 496
EP - 500
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-4
ER -