Crater formation and sputtering by cluster impacts

Z. Insepov; L. P. Allen; C. Santeufemio; K. S. Jones; I. Yamada

doi:10.1016/S0168-583X(03)00876-0

Crater formation and sputtering by cluster impacts

Z. Insepov, L. P. Allen, C. Santeufemio, K. S. Jones, I. Yamada

Research output: Contribution to journal › Conference article › peer-review

14 Citations (Scopus)

Abstract

A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B₁₀ cluster ions, with energy of 1-15 keV, was calculated.

Original language	English
Pages (from-to)	846-850
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	206
DOIs	https://doi.org/10.1016/S0168-583X(03)00876-0
Publication status	Published - May 2003
Externally published	Yes
Event	13th International conference on Ion beam modification of Mate - Kobe, Japan Duration: Sep 1 2002 → Sep 6 2002

Keywords

AFM
Cluster
Crater
Decaborane
Multiscale
TEM

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Access to Document

10.1016/S0168-583X(03)00876-0

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title = "Crater formation and sputtering by cluster impacts",

abstract = "A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.",

keywords = "AFM, Cluster, Crater, Decaborane, Multiscale, TEM",

author = "Z. Insepov and Allen, {L. P.} and C. Santeufemio and Jones, {K. S.} and I. Yamada",

year = "2003",

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language = "English",

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pages = "846--850",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

note = "13th International conference on Ion beam modification of Mate ; Conference date: 01-09-2002 Through 06-09-2002",

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TY - JOUR

T1 - Crater formation and sputtering by cluster impacts

AU - Insepov, Z.

AU - Allen, L. P.

AU - Santeufemio, C.

AU - Jones, K. S.

AU - Yamada, I.

PY - 2003/5

Y1 - 2003/5

N2 - A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.

AB - A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.

KW - AFM

KW - Cluster

KW - Crater

KW - Decaborane

KW - Multiscale

KW - TEM

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SP - 846

EP - 850

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

T2 - 13th International conference on Ion beam modification of Mate

Y2 - 1 September 2002 through 6 September 2002

ER -