TY - JOUR
T1 - Crater formation and sputtering by cluster impacts
AU - Insepov, Z.
AU - Allen, L. P.
AU - Santeufemio, C.
AU - Jones, K. S.
AU - Yamada, I.
N1 - Funding Information:
The authors gratefully acknowledge valuable discussions with John Hautala, Tom Tetreault, Yan Shao, Mike Mack, and Allen Kirkpatrick of Epion Corporation. This work was partially supported by the NEDO project (Japan). The integral support of the USAF under contract #F33615-00-C-5404 is sincerely acknowledged. GCIB equipment and process work under DoC-NIST ATP award contract #70NANB8H4011 is also appreciated.
PY - 2003/5
Y1 - 2003/5
N2 - A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.
AB - A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.
KW - AFM
KW - Cluster
KW - Crater
KW - Decaborane
KW - Multiscale
KW - TEM
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U2 - 10.1016/S0168-583X(03)00876-0
DO - 10.1016/S0168-583X(03)00876-0
M3 - Conference article
AN - SCOPUS:0038074414
VL - 206
SP - 846
EP - 850
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
T2 - 13th International conference on Ion beam modification of Mate
Y2 - 1 September 2002 through 6 September 2002
ER -