A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.
|Number of pages||5|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - May 1 2003|
|Event||13th International conference on Ion beam modification of Mate - Kobe, Japan|
Duration: Sep 1 2002 → Sep 6 2002
ASJC Scopus subject areas
- Nuclear and High Energy Physics