Crater formation and sputtering by cluster impacts

Z. Insepov, L. P. Allen, C. Santeufemio, K. S. Jones, I. Yamada

Research output: Contribution to journalConference articlepeer-review

14 Citations (Scopus)


A multiscale computational model coupling atomistic molecular dynamics simulations with continuum elasticity was used for studying craters formed on Si surfaces by Ar cluster impacts, with energies of 20-50 eV/atom. The results were confirmed by atomic force microscopy/transmission electron microscopy. They show that on a Si (1 0 0), craters are nearly triangular in cross-section, with the facets directed along the close-packed (1 1 1) planes, and exhibit fourfold symmetry. The craters on Si (1 1 1) surface are well rounded in cross-section and the top-view shows a complicated sixfold or triangular image. The sputtering yield from Si surfaces bombarded with B10 cluster ions, with energy of 1-15 keV, was calculated.

Original languageEnglish
Pages (from-to)846-850
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - May 2003
Externally publishedYes
Event13th International conference on Ion beam modification of Mate - Kobe, Japan
Duration: Sep 1 2002Sep 6 2002


  • AFM
  • Cluster
  • Crater
  • Decaborane
  • Multiscale
  • TEM

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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