CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman, Seigo Ishino, Kunio Shinohara

Research output: Contribution to journalArticle

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1138-1140
Number of pages3
JournalJournal of Chemical Engineering of Japan
Volume30
Issue number6
Publication statusPublished - Dec 1997
Externally publishedYes

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Aluminum Compounds
Aluminum compounds
Chemical reactors
Carbon Monoxide
Chemical vapor deposition
Agglomeration
Coatings
silicon nitride

Keywords

  • Co-Current
  • Coating
  • CVD
  • Moving Bed
  • Ultra Fine Particle

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Chemistry(all)

Cite this

CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor. / Golman, Boris; Ishino, Seigo; Shinohara, Kunio.

In: Journal of Chemical Engineering of Japan, Vol. 30, No. 6, 12.1997, p. 1138-1140.

Research output: Contribution to journalArticle

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