CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman; Seigo Ishino; Kunio Shinohara

CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman, Seigo Ishino, Kunio Shinohara

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1138-1140
Number of pages	3
Journal	Journal of Chemical Engineering of Japan
Volume	30
Issue number	6
Publication status	Published - Dec 1997
Externally published	Yes

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Aluminum Compounds

Aluminum compounds

Chemical reactors

Carbon Monoxide

Chemical vapor deposition

Agglomeration

Coatings

silicon nitride

Keywords

Co-Current
Coating
CVD
Moving Bed
Ultra Fine Particle

ASJC Scopus subject areas

Chemical Engineering(all)
Chemistry(all)

Cite this

Golman, B., Ishino, S., & Shinohara, K. (1997). CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor. Journal of Chemical Engineering of Japan, 30(6), 1138-1140.

CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor. / Golman, Boris; Ishino, Seigo; Shinohara, Kunio.

In: Journal of Chemical Engineering of Japan, Vol. 30, No. 6, 12.1997, p. 1138-1140.

Research output: Contribution to journal › Article

Golman, B, Ishino, S & Shinohara, K 1997, 'CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor', Journal of Chemical Engineering of Japan, vol. 30, no. 6, pp. 1138-1140.

Golman B, Ishino S, Shinohara K. CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor. Journal of Chemical Engineering of Japan. 1997 Dec;30(6):1138-1140.

Golman, Boris ; Ishino, Seigo ; Shinohara, Kunio. / CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor. In: Journal of Chemical Engineering of Japan. 1997 ; Vol. 30, No. 6. pp. 1138-1140.

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