CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman; Seigo Ishino; Kunio Shinohara

doi:10.1252/jcej.30.1138

CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman, Seigo Ishino, Kunio Shinohara

Department of Chemical and Materials Engineering

Research output: Contribution to journal › Article

10 Citations (Scopus)

Original language	English
Pages (from-to)	1138-1140
Number of pages	3
Journal	Journal of Chemical Engineering of Japan
Volume	30
Issue number	6
DOIs	https://doi.org/10.1252/jcej.30.1138
Publication status	Published - Dec 1997

Keywords

CVD
Co-Current
Coating
Moving Bed
Ultra Fine Particle

ASJC Scopus subject areas

Chemistry(all)
Chemical Engineering(all)

Access to Document

10.1252/jcej.30.1138

Cite this

Golman, B., Ishino, S., & Shinohara, K. (1997). CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor. Journal of Chemical Engineering of Japan, 30(6), 1138-1140. https://doi.org/10.1252/jcej.30.1138

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