CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman; Seigo Ishino; Kunio Shinohara

doi:10.1252/jcej.30.1138

CVD coating of Si₃N₄ ultra-fine particles with AIN in CO-current moving bed reactor

Boris Golman, Seigo Ishino, Kunio Shinohara

Department of Chemical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Original language	English
Pages (from-to)	1138-1140
Number of pages	3
Journal	Journal of Chemical Engineering of Japan
Volume	30
Issue number	6
DOIs	https://doi.org/10.1252/jcej.30.1138
Publication status	Published - Dec 1997

Keywords

CVD
Co-Current
Coating
Moving Bed
Ultra Fine Particle

ASJC Scopus subject areas

Chemistry(all)
Chemical Engineering(all)

Access to Document

10.1252/jcej.30.1138

Cite this

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title = "CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor",

keywords = "CVD, Co-Current, Coating, Moving Bed, Ultra Fine Particle",

author = "Boris Golman and Seigo Ishino and Kunio Shinohara",

year = "1997",

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doi = "10.1252/jcej.30.1138",

language = "English",

volume = "30",

pages = "1138--1140",

journal = "Journal of Chemical Engineering of Japan",

issn = "0021-9592",

publisher = "Society of Chemical Engineers, Japan",

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AU - Golman, Boris

AU - Ishino, Seigo

AU - Shinohara, Kunio

PY - 1997/12

Y1 - 1997/12

KW - CVD

KW - Co-Current

KW - Coating

KW - Moving Bed

KW - Ultra Fine Particle

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