Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors

S. Poeggel, D. Tosi, G. Leen, E. Lewis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
PublisherIEEE Computer Society
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany
Duration: May 12 2013May 16 2013

Other

Other2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
CountryGermany
CityMunich
Period5/12/135/16/13

Fingerprint

Fiber optic sensors
Pressure sensors
Diaphragms
Etching
Hydrofluoric acid
Fibers
Medical applications
Air
Polishing
Glass fibers
Optical fibers
Resonators
Gases

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Poeggel, S., Tosi, D., Leen, G., & Lewis, E. (2013). Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. In 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 [6801203] IEEE Computer Society. https://doi.org/10.1109/CLEOE-IQEC.2013.6801203

Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. / Poeggel, S.; Tosi, D.; Leen, G.; Lewis, E.

2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013. IEEE Computer Society, 2013. 6801203.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Poeggel, S, Tosi, D, Leen, G & Lewis, E 2013, Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. in 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013., 6801203, IEEE Computer Society, 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany, 5/12/13. https://doi.org/10.1109/CLEOE-IQEC.2013.6801203
Poeggel S, Tosi D, Leen G, Lewis E. Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. In 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013. IEEE Computer Society. 2013. 6801203 https://doi.org/10.1109/CLEOE-IQEC.2013.6801203
Poeggel, S. ; Tosi, D. ; Leen, G. ; Lewis, E. / Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013. IEEE Computer Society, 2013.
@inproceedings{8ff479e6cf354070ab402ec1f59b27c7,
title = "Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors",
abstract = "Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.",
author = "S. Poeggel and D. Tosi and G. Leen and E. Lewis",
year = "2013",
doi = "10.1109/CLEOE-IQEC.2013.6801203",
language = "English",
booktitle = "2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013",
publisher = "IEEE Computer Society",
address = "United States",

}

TY - GEN

T1 - Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors

AU - Poeggel, S.

AU - Tosi, D.

AU - Leen, G.

AU - Lewis, E.

PY - 2013

Y1 - 2013

N2 - Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.

AB - Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.

UR - http://www.scopus.com/inward/record.url?scp=84900306369&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84900306369&partnerID=8YFLogxK

U2 - 10.1109/CLEOE-IQEC.2013.6801203

DO - 10.1109/CLEOE-IQEC.2013.6801203

M3 - Conference contribution

BT - 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013

PB - IEEE Computer Society

ER -