Abstract
Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.
| Original language | English |
|---|---|
| Title of host publication | 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 |
| Publisher | IEEE Computer Society |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany Duration: May 12 2013 → May 16 2013 |
Other
| Other | 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 |
|---|---|
| Country | Germany |
| City | Munich |
| Period | 5/12/13 → 5/16/13 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. / Poeggel, S.; Tosi, D.; Leen, G.; Lewis, E.
2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013. IEEE Computer Society, 2013. 6801203.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors
AU - Poeggel, S.
AU - Tosi, D.
AU - Leen, G.
AU - Lewis, E.
PY - 2013
Y1 - 2013
N2 - Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.
AB - Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.
UR - http://www.scopus.com/inward/record.url?scp=84900306369&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84900306369&partnerID=8YFLogxK
U2 - 10.1109/CLEOE-IQEC.2013.6801203
DO - 10.1109/CLEOE-IQEC.2013.6801203
M3 - Conference contribution
BT - 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
PB - IEEE Computer Society
ER -