Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors

S. Poeggel, D. Tosi, G. Leen, E. Lewis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Extrinsic Fabry-Perot interferometric (EFPI] pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d∼3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid [HF] is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
PublisherIEEE Computer Society
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany
Duration: May 12 2013May 16 2013

Other

Other2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
CountryGermany
CityMunich
Period5/12/135/16/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Poeggel, S., Tosi, D., Leen, G., & Lewis, E. (2013). Diaphragm etching in extrinsic Fabry-Perot interferometric fiber optic pressure sensors. In 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 [6801203] IEEE Computer Society. https://doi.org/10.1109/CLEOE-IQEC.2013.6801203