The SWR of deep-etched InP/InGaAsP wveguides was directly characterized using specially designed staircase patterns that made the waveguide's sidewalls accessible for large area scanning with AFM tips. Thus, ICP-RIE using NiCr/SiO2 composite masking layer resulted in very smooth and highly vertical sidewall profiles. Autocovariance function and power spectrum of SWR were used to estimate optical loss performance of waveguides.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)