TY - JOUR
T1 - Direct simulation Monte Carlo method for gas cluster ion beam technology
AU - Insepov, Z.
AU - Yamada, I.
N1 - Funding Information:
One of the authors (Z.I.) acknowledges valuable discussions on the fundamentals of the DSMC method by Prof. Donald Baganoff of Stanford University. This work was supported by the NEDO project (Japan).
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2003/4
Y1 - 2003/4
N2 - A direct simulation Monte Carlo method has been developed and applied for the simulation of a supersonic Ar gas expansion through a converging-diverging nozzle, with the stagnation pressures of P0 = 0.1-10 atm, at various temperatures. A body-fitted coordinate system has been developed that allows modeling nozzles of arbitrary shape. A wide selection of nozzle sizes, apex angles, with diffuse and specular atomic reflection laws from the nozzle walls, has been studied. The results of nozzle simulation were used to obtain a scaling law P0T019/8dαLn β = const. for the constant mean cluster sizes that are formed in conical nozzles. The Hagena's formula, valid for the conical nozzles with a constant length, has further been extended to the conical nozzles with variable lengths, based on our simulation results.
AB - A direct simulation Monte Carlo method has been developed and applied for the simulation of a supersonic Ar gas expansion through a converging-diverging nozzle, with the stagnation pressures of P0 = 0.1-10 atm, at various temperatures. A body-fitted coordinate system has been developed that allows modeling nozzles of arbitrary shape. A wide selection of nozzle sizes, apex angles, with diffuse and specular atomic reflection laws from the nozzle walls, has been studied. The results of nozzle simulation were used to obtain a scaling law P0T019/8dαLn β = const. for the constant mean cluster sizes that are formed in conical nozzles. The Hagena's formula, valid for the conical nozzles with a constant length, has further been extended to the conical nozzles with variable lengths, based on our simulation results.
KW - Body-fitted coordinate
KW - Cluster size
KW - Direct simulation Monte Carlo
KW - Supersonic nozzle
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U2 - 10.1016/S0168-583X(02)01870-0
DO - 10.1016/S0168-583X(02)01870-0
M3 - Conference article
AN - SCOPUS:0037379007
VL - 202
SP - 283
EP - 288
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
T2 - 6th International Conference on Computer Simulation of Radiation
Y2 - 23 June 2002 through 27 June 2002
ER -