Elastic and structural properties of nanometer scale-thick refractory metal films

Talgat A. Yakupov, Zhandos N. Utegulov, Taha Demirkan, Tansel Karabacak

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties of studied hard thin coatings are measured by non-destructive nanosecond laser pulse induced surface acoustic wave technique, while their structural and dimensional properties are analysed using X-ray diffraction (XRD) and scanning electron microscopy, respectively. It was found that the Young's modulus of these films increase with their nanoscale thickness. Young's modulus of hard metals (W, Mo) was consistently higher than those of their bulk. However, the modulus of Ta films was higher than that of the corresponding bulk metal except for the film with the lowest thickness (22 nm). XRD analysis revealed that all films are under compressive stress, but this stress is diminished in thicker films.

Original languageEnglish
Pages (from-to)4469-4476
Number of pages8
JournalMaterials Today: Proceedings
Volume4
Issue number3
DOIs
Publication statusPublished - 2017

Fingerprint

Refractory metals
Structural properties
Elastic moduli
Silicon
Metals
Compressive stress
Thick films
Refractory materials
Magnetron sputtering
Surface waves
X ray diffraction analysis
Laser pulses
Acoustic waves
X ray diffraction
Thin films
Coatings
Scanning electron microscopy
Substrates

Keywords

  • crystal structure
  • elastic properties
  • refractory metals
  • Thin films

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Elastic and structural properties of nanometer scale-thick refractory metal films. / Yakupov, Talgat A.; Utegulov, Zhandos N.; Demirkan, Taha; Karabacak, Tansel.

In: Materials Today: Proceedings, Vol. 4, No. 3, 2017, p. 4469-4476.

Research output: Contribution to journalArticle

Yakupov, Talgat A. ; Utegulov, Zhandos N. ; Demirkan, Taha ; Karabacak, Tansel. / Elastic and structural properties of nanometer scale-thick refractory metal films. In: Materials Today: Proceedings. 2017 ; Vol. 4, No. 3. pp. 4469-4476.
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