Abstract
In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties of studied hard thin coatings are measured by non-destructive nanosecond laser pulse induced surface acoustic wave technique, while their structural and dimensional properties are analysed using X-ray diffraction (XRD) and scanning electron microscopy, respectively. It was found that the Young's modulus of these films increase with their nanoscale thickness. Young's modulus of hard metals (W, Mo) was consistently higher than those of their bulk. However, the modulus of Ta films was higher than that of the corresponding bulk metal except for the film with the lowest thickness (22 nm). XRD analysis revealed that all films are under compressive stress, but this stress is diminished in thicker films.
| Original language | English |
|---|---|
| Pages (from-to) | 4469-4476 |
| Number of pages | 8 |
| Journal | Materials Today: Proceedings |
| Volume | 4 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2017 |
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Keywords
- crystal structure
- elastic properties
- refractory metals
- Thin films
ASJC Scopus subject areas
- Materials Science(all)
Cite this
Elastic and structural properties of nanometer scale-thick refractory metal films. / Yakupov, Talgat A.; Utegulov, Zhandos N.; Demirkan, Taha; Karabacak, Tansel.
In: Materials Today: Proceedings, Vol. 4, No. 3, 2017, p. 4469-4476.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Elastic and structural properties of nanometer scale-thick refractory metal films
AU - Yakupov, Talgat A.
AU - Utegulov, Zhandos N.
AU - Demirkan, Taha
AU - Karabacak, Tansel
PY - 2017
Y1 - 2017
N2 - In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties of studied hard thin coatings are measured by non-destructive nanosecond laser pulse induced surface acoustic wave technique, while their structural and dimensional properties are analysed using X-ray diffraction (XRD) and scanning electron microscopy, respectively. It was found that the Young's modulus of these films increase with their nanoscale thickness. Young's modulus of hard metals (W, Mo) was consistently higher than those of their bulk. However, the modulus of Ta films was higher than that of the corresponding bulk metal except for the film with the lowest thickness (22 nm). XRD analysis revealed that all films are under compressive stress, but this stress is diminished in thicker films.
AB - In this work, we investigate thickness-dependent elastic and structural properties of refractory W, Ta and Mo thin films fabricated by radio-frequency magnetron sputtering on silicon substrates. Elastic properties of studied hard thin coatings are measured by non-destructive nanosecond laser pulse induced surface acoustic wave technique, while their structural and dimensional properties are analysed using X-ray diffraction (XRD) and scanning electron microscopy, respectively. It was found that the Young's modulus of these films increase with their nanoscale thickness. Young's modulus of hard metals (W, Mo) was consistently higher than those of their bulk. However, the modulus of Ta films was higher than that of the corresponding bulk metal except for the film with the lowest thickness (22 nm). XRD analysis revealed that all films are under compressive stress, but this stress is diminished in thicker films.
KW - crystal structure
KW - elastic properties
KW - refractory metals
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85020909251&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85020909251&partnerID=8YFLogxK
U2 - 10.1016/j.matpr.2017.04.019
DO - 10.1016/j.matpr.2017.04.019
M3 - Article
VL - 4
SP - 4469
EP - 4476
JO - Materials Today: Proceedings
JF - Materials Today: Proceedings
SN - 2214-7853
IS - 3
ER -