Electrode and condenser materials for plasma pinch sources

A. Hassanein, J. P. Allain, T. Burtseva, Z. Insepov, J. N. Brooks, I. Konkashbaev, V. Morozov, V. Sizyuk, V. Tolkach, T. Sizyuk, B. Rice, V. Safronov, V. Bakshi

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationEUV Sources for Lithography
PublisherSPIE
Pages915-956
Number of pages42
ISBN (Electronic)9780819480712
ISBN (Print)0819458457, 9780819458452
DOIs
Publication statusPublished - Feb 23 2006
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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