Erratum

Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]

Yi Ching Lin, Ilesanmi Adesida, Andrew R. Neureuther

Research output: Contribution to journalComment/debate

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)474
Number of pages1
JournalApplied Physics Letters
Volume38
Issue number6
DOIs
Publication statusPublished - 1981
Externally publishedYes

Fingerprint

electron beams
simulation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Erratum : Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]. / Lin, Yi Ching; Adesida, Ilesanmi; Neureuther, Andrew R.

In: Applied Physics Letters, Vol. 38, No. 6, 1981, p. 474.

Research output: Contribution to journalComment/debate

@article{e02a91f33a064ad5b914e5006e78daa3,
title = "Erratum: Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]",
author = "Lin, {Yi Ching} and Ilesanmi Adesida and Neureuther, {Andrew R.}",
year = "1981",
doi = "10.1063/1.92509",
language = "English",
volume = "38",
pages = "474",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "6",

}

TY - JOUR

T1 - Erratum

T2 - Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]

AU - Lin, Yi Ching

AU - Adesida, Ilesanmi

AU - Neureuther, Andrew R.

PY - 1981

Y1 - 1981

UR - http://www.scopus.com/inward/record.url?scp=36749105276&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36749105276&partnerID=8YFLogxK

U2 - 10.1063/1.92509

DO - 10.1063/1.92509

M3 - Comment/debate

VL - 38

SP - 474

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 6

ER -