Erratum: Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]

Yi Ching Lin, Ilesanmi Adesida, Andrew R. Neureuther

Research output: Contribution to journalComment/debate

1 Citation (Scopus)
Original languageEnglish
Number of pages1
JournalApplied Physics Letters
Volume38
Issue number6
DOIs
Publication statusPublished - Dec 1 1981

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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