Formation of low resistance nonalloyed Al/Pt ohmic contacts on n-type ZnO epitaxial layer

Han Ki Kim, Kyoung Kook Kim, Seong Ju Park, Tae Yeon Seong, Ilesanmi Adesida

Research output: Contribution to journalArticlepeer-review

113 Citations (Scopus)

Abstract

The formation of low resistance nonalloyed Al/Pt ohmic contacts on n-type ZnO epitaxial layer was investigated. The specific contact resistivity was determined by using a circular-transmission line method. It was shown that the as-deposited Al\Pt contacts produce a specific contact resistivity of 1.2×10-5 ωcm2.

Original languageEnglish
Pages (from-to)4225-4227
Number of pages3
JournalJournal of Applied Physics
Volume94
Issue number6
DOIs
Publication statusPublished - Sep 15 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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