Gallium nitride whiskers formed by selective photoenhanced wet etching of dislocations

C. Youtsey, L. T. Romano, I. Adesida

Research output: Contribution to journalArticlepeer-review

232 Citations (Scopus)

Abstract

Gallium nitride is used to fabricate high brightness blue and green light-emitting diodes in spite of high densities of extended structural defects. We describe a photoelectrochemical etching process that reveals the dislocation microstructure of n-type GaN films by selectively removing material between dislocations. The GaN whiskers formed by the etching have diameters between 10 and 50 nm and lengths of up to 1 μm. A correlation between the etched features and threading dislocations in the unetched film is confirmed through transmission electron microscopy studies. The whisker formation is believed to be indicative of electrical activity at dislocations in GaN.

Original languageEnglish
Pages (from-to)797-799
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number6
DOIs
Publication statusPublished - Dec 1 1998

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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