TY - JOUR
T1 - Growth of copper-indium nanorods on Si substrate using porous anodic alumina as template
AU - Zhang, W.
AU - Lam, H.
AU - Li, J.
AU - Wang, M.
AU - Jiang, S.
AU - Surya, C.
AU - Zhu, F.
N1 - Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - Copper-indium nanorod arrays have been synthesized by electrodeposition using porous anodic alumina nano template supported on a silicon substrate. Porous anodic alumina template was fabricated by evaporating aluminium film onto silicon substrate and then anodizing the aluminium film in diluted phosphoric acid. The approach employs a plasma etching to penetrate the alumina pore barrier layer before electrodeposition, which enables direct electrical and chemical contact with the silicon substrate electrode. The resulting template and copper-indium nonorods obtained were characterized using scanning electron microscopy (SEM) and energy-dispersived X-ray spectroscopic analyzer (EDS), the pores of alumina are found to have dimensions of 150-250 nm pore diameters and 330-510 nm pore spacings, partial filling of the pores of the alumina template by Cu-In is achieved. The results of this work reveal that the alumina nano template is particularly well suited to the etching mask and template-assisted growth of nanostructures to be integrated into rigid substrate.
AB - Copper-indium nanorod arrays have been synthesized by electrodeposition using porous anodic alumina nano template supported on a silicon substrate. Porous anodic alumina template was fabricated by evaporating aluminium film onto silicon substrate and then anodizing the aluminium film in diluted phosphoric acid. The approach employs a plasma etching to penetrate the alumina pore barrier layer before electrodeposition, which enables direct electrical and chemical contact with the silicon substrate electrode. The resulting template and copper-indium nonorods obtained were characterized using scanning electron microscopy (SEM) and energy-dispersived X-ray spectroscopic analyzer (EDS), the pores of alumina are found to have dimensions of 150-250 nm pore diameters and 330-510 nm pore spacings, partial filling of the pores of the alumina template by Cu-In is achieved. The results of this work reveal that the alumina nano template is particularly well suited to the etching mask and template-assisted growth of nanostructures to be integrated into rigid substrate.
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U2 - 10.1088/1742-6596/188/1/012028
DO - 10.1088/1742-6596/188/1/012028
M3 - Article
AN - SCOPUS:73349120284
VL - 188
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
M1 - 012028
ER -