Growth of ZnO:Al by atomic layer deposition: Deconvoluting the contribution of hydrogen interstitials and crystallographic texture on the conductivity

O. Mauit, D. Caffrey, A. Ainabayev, Aitkazy Kaisha, Olzat Toktarbaiuly, Yerzhigit Sugurbekov, Gulnar Sugurbekova, Igor V. Shvets, Karsten Fleischer

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