Improving the quality of GaN on Si(111) substrate with a medium-temperature/high-temperature bilayer AlN buffer

Peng Xiang, Minggang Liu, Yibin Yang, Weijie Chen, Zhiyuan He, Ka Kuen Leung, Charles Surya, Xiaobiao Han, Zhisheng Wu, Yang Liu, Baijun Zhang

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A medium-temperature/high-temperature (MT/HT) bilayer AlN buffer was introduced for GaN grown on Si(111) by metal organic chemical vapor deposition. The properties of the GaN films with a MT/HT bilayer AlN buffer and those with a single-layer HT-AlN buffer were compared and the influence of the growth temperature of the MT-AlN layer was investigated. With a MT-AlN layer grown in the temperature range from 800 to 1000 °C, the crystalline qualities of the subsequent HT-AlN layer and the GaN film were improved. According to the X-ray diffraction results and the transmission electron microscopy images, the dislocation density in GaN film was reduced with a MT/HT bilayer AlN buffer as compared to those with a single-layer HT-AlN buffer. Moreover, photoluminescence and Raman spectra exhibit enhanced optical properties and less tensile stresses of the GaN film. Better surface morphology of GaN was also obtained with a MT/HT bilayer AlN buffer.

Original languageEnglish
Article number08JB18
JournalJapanese Journal of Applied Physics
Volume52
Issue number8 PART 2
DOIs
Publication statusPublished - Aug 1 2013
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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