Indium-phosphide-based microresonator modulators and wavelength multiplexers

J. H. Abeles, M. H. Kwakernaak, H. Mohseni, A. N. Lepore, G. A. Pajer, G. Griffel, T. P. Lee, A. M. Braun, D. R. Bechtle, Z. A. Shellenbarger, I. Adesida, S. Rommel, J. W. Bae, J. H. Jang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The combination of nanofabrication techniques, laterally coupled micro-ring -resonator modulator design, angle multi-mode interference couplers, and highly efficient InP-based modulator materials, were studied to demonstrate wavelength selective modulator arrays. A low-capacitance self-aligned electrode current was employed to permit high-speed modulation of 1-μm-wide waveguide ridges possessing low capacitance. High-aspect-ratio ridges are formed by Cl/Ar/H inductively coupled plasma reactive ion etching with wall roughness of a few nm. Digital modulation at 1 GHz shows good sensitivity of 600 mV peak-to-peak.

Original languageEnglish
Pages (from-to)60-61
Number of pages2
JournalLEOS Summer Topical Meeting
Publication statusPublished - 2004
Externally publishedYes

Fingerprint

Indium phosphide
indium phosphides
multiplexing
Modulators
modulators
Wavelength
ridges
Capacitance
capacitance
Modulation
wavelengths
modulation
Ridge waveguides
Plasma etching
nanofabrication
Reactive ion etching
Inductively coupled plasma
high aspect ratio
Nanotechnology
couplers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Abeles, J. H., Kwakernaak, M. H., Mohseni, H., Lepore, A. N., Pajer, G. A., Griffel, G., ... Jang, J. H. (2004). Indium-phosphide-based microresonator modulators and wavelength multiplexers. LEOS Summer Topical Meeting, 60-61.

Indium-phosphide-based microresonator modulators and wavelength multiplexers. / Abeles, J. H.; Kwakernaak, M. H.; Mohseni, H.; Lepore, A. N.; Pajer, G. A.; Griffel, G.; Lee, T. P.; Braun, A. M.; Bechtle, D. R.; Shellenbarger, Z. A.; Adesida, I.; Rommel, S.; Bae, J. W.; Jang, J. H.

In: LEOS Summer Topical Meeting, 2004, p. 60-61.

Research output: Contribution to journalArticle

Abeles, JH, Kwakernaak, MH, Mohseni, H, Lepore, AN, Pajer, GA, Griffel, G, Lee, TP, Braun, AM, Bechtle, DR, Shellenbarger, ZA, Adesida, I, Rommel, S, Bae, JW & Jang, JH 2004, 'Indium-phosphide-based microresonator modulators and wavelength multiplexers', LEOS Summer Topical Meeting, pp. 60-61.
Abeles JH, Kwakernaak MH, Mohseni H, Lepore AN, Pajer GA, Griffel G et al. Indium-phosphide-based microresonator modulators and wavelength multiplexers. LEOS Summer Topical Meeting. 2004;60-61.
Abeles, J. H. ; Kwakernaak, M. H. ; Mohseni, H. ; Lepore, A. N. ; Pajer, G. A. ; Griffel, G. ; Lee, T. P. ; Braun, A. M. ; Bechtle, D. R. ; Shellenbarger, Z. A. ; Adesida, I. ; Rommel, S. ; Bae, J. W. ; Jang, J. H. / Indium-phosphide-based microresonator modulators and wavelength multiplexers. In: LEOS Summer Topical Meeting. 2004 ; pp. 60-61.
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AU - Kwakernaak, M. H.

AU - Mohseni, H.

AU - Lepore, A. N.

AU - Pajer, G. A.

AU - Griffel, G.

AU - Lee, T. P.

AU - Braun, A. M.

AU - Bechtle, D. R.

AU - Shellenbarger, Z. A.

AU - Adesida, I.

AU - Rommel, S.

AU - Bae, J. W.

AU - Jang, J. H.

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