Indium-phosphide-based microresonator modulators and wavelength multiplexers

J. H. Abeles, M. H. Kwakernaak, H. Mohseni, A. N. Lepore, G. A. Pajer, G. Griffel, T. P. Lee, A. M. Braun, D. R. Bechtle, Z. A. Shellenbarger, I. Adesida, S. Rommel, J. W. Bae, J. H. Jang

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

The combination of nanofabrication techniques, laterally coupled micro-ring -resonator modulator design, angle multi-mode interference couplers, and highly efficient InP-based modulator materials, were studied to demonstrate wavelength selective modulator arrays. A low-capacitance self-aligned electrode current was employed to permit high-speed modulation of 1-μm-wide waveguide ridges possessing low capacitance. High-aspect-ratio ridges are formed by Cl/Ar/H inductively coupled plasma reactive ion etching with wall roughness of a few nm. Digital modulation at 1 GHz shows good sensitivity of 600 mV peak-to-peak.

Original languageEnglish
Pages (from-to)60-61
Number of pages2
JournalLEOS Summer Topical Meeting
Publication statusPublished - Sep 29 2004
Event2004 Digest of the LEOS Summer Topical Meetings - San Diego, CA, United States
Duration: Jul 28 2004Jul 30 2004

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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