InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

R. M. Lammert, A. M. Jones, C. T. Youtsey, J. S. Hughes, S. D. Roh, I. Adesida, J. J. Coleman

Research output: Contribution to journalConference article

Abstract

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.

Original languageEnglish
Pages (from-to)278-279
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
Publication statusPublished - Dec 1 1997
EventProceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) - San Francisco, CA, USA
Duration: Nov 10 1997Nov 13 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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