InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

R. M. Lammert, A. M. Jones, C. T. Youtsey, J. S. Hughes, S. D. Roh, I. Adesida, J. J. Coleman

Research output: Contribution to journalArticle

Abstract

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.

Original languageEnglish
Pages (from-to)278-279
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
Publication statusPublished - 1997
Externally publishedYes

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DBR lasers
Distributed Bragg reflectors
Ridge waveguides
Fabrication
Electron beam lithography
Distributed feedback lasers
Ion beams
Etching
Contamination

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Cite this

InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE. / Lammert, R. M.; Jones, A. M.; Youtsey, C. T.; Hughes, J. S.; Roh, S. D.; Adesida, I.; Coleman, J. J.

In: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, Vol. 1, 1997, p. 278-279.

Research output: Contribution to journalArticle

Lammert, R. M. ; Jones, A. M. ; Youtsey, C. T. ; Hughes, J. S. ; Roh, S. D. ; Adesida, I. ; Coleman, J. J. / InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE. In: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS. 1997 ; Vol. 1. pp. 278-279.
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AU - Roh, S. D.

AU - Adesida, I.

AU - Coleman, J. J.

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