Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate

T. K. Tang, L. M. Miller, T. Cockerill, P. D. Swanson, R. Bryan, T. A. Detemple, I. Adesida, J. J. Coleman

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An experimental comparison is made of the loss of Al- rGa1-rAs heterostructure waveguide routing geometries at ≈860 nm patterned by two methods: Zn impurity induced layer disordering and native growth on a patterned substrate. Two multimode geometries were investigated: a raised cosine s-bend and a modified abrupt bend due to Shiina et al. [8, p. 736]. The measured transition distance for 3 dB loss was approximately 300 μm for 100 μm offset guides in the s-bend geometry for the patterned substrate samples using wet and dry etching methods. For the Shiina bend, the measured angle corresponding to the 3 dB loss was ≈13° also for both etching methods. These results represent significant improvements over the equivalent structures fabricated by impurity induced layer disordering primarily because of reduced free-carrier loss.

Original languageEnglish
Pages (from-to)120-122
Number of pages3
JournalIEEE Photonics Technology Letters
Volume1
Issue number6
DOIs
Publication statusPublished - 1989
Externally publishedYes

Fingerprint

Heterojunctions
Waveguides
waveguides
Substrates
Geometry
geometry
etching
Impurities
impurities
Dry etching
Wet etching
Etching

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Tang, T. K., Miller, L. M., Cockerill, T., Swanson, P. D., Bryan, R., Detemple, T. A., ... Coleman, J. J. (1989). Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate. IEEE Photonics Technology Letters, 1(6), 120-122. https://doi.org/10.1109/68.36008

Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate. / Tang, T. K.; Miller, L. M.; Cockerill, T.; Swanson, P. D.; Bryan, R.; Detemple, T. A.; Adesida, I.; Coleman, J. J.

In: IEEE Photonics Technology Letters, Vol. 1, No. 6, 1989, p. 120-122.

Research output: Contribution to journalArticle

Tang, TK, Miller, LM, Cockerill, T, Swanson, PD, Bryan, R, Detemple, TA, Adesida, I & Coleman, JJ 1989, 'Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate', IEEE Photonics Technology Letters, vol. 1, no. 6, pp. 120-122. https://doi.org/10.1109/68.36008
Tang TK, Miller LM, Cockerill T, Swanson PD, Bryan R, Detemple TA et al. Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate. IEEE Photonics Technology Letters. 1989;1(6):120-122. https://doi.org/10.1109/68.36008
Tang, T. K. ; Miller, L. M. ; Cockerill, T. ; Swanson, P. D. ; Bryan, R. ; Detemple, T. A. ; Adesida, I. ; Coleman, J. J. / Loss in Heterostructure Waveguide Bends Formed on a Patterned Substrate. In: IEEE Photonics Technology Letters. 1989 ; Vol. 1, No. 6. pp. 120-122.
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