MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION.

M. Zhang, I. Adesida, R. Tiberio, E. D. Wolf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ion beam lithography is a relatively new technique for fabricating high resolution features. We demonstrate the feasibility of fabricating submicron gate GaAs FET by masked ion beam lithography (MIBL) combined with conventional optical lithography. A fully transparent thin silicon film mask was used for MIBL. The electrical performance data of Al/GaAs Schottky diodes and of 0. 2-0. 5 mu m gate GaAs FETs obtained with this hybrid lithography process are also presented.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherAcademic Press
Pages157-164
Number of pages8
ISBN (Print)0120449803
Publication statusPublished - 1983
Externally publishedYes

Fingerprint

Ion beam lithography
Field effect transistors
Photolithography
Lithography
Masks
Diodes
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Zhang, M., Adesida, I., Tiberio, R., & Wolf, E. D. (1983). MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION. In Unknown Host Publication Title (pp. 157-164). Academic Press.

MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION. / Zhang, M.; Adesida, I.; Tiberio, R.; Wolf, E. D.

Unknown Host Publication Title. Academic Press, 1983. p. 157-164.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, M, Adesida, I, Tiberio, R & Wolf, ED 1983, MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION. in Unknown Host Publication Title. Academic Press, pp. 157-164.
Zhang M, Adesida I, Tiberio R, Wolf ED. MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION. In Unknown Host Publication Title. Academic Press. 1983. p. 157-164
Zhang, M. ; Adesida, I. ; Tiberio, R. ; Wolf, E. D. / MASKED ION BEAM LITHOGRAPHY FOR SUBMICRON-GATE GaAs FET FABRICATION. Unknown Host Publication Title. Academic Press, 1983. pp. 157-164
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