Modeling of the substrate topography upon nanosized profiling by focused ion beams

O. A. Ageev, A. M. Alekseev, A. V. Vnukova, A. L. Gromov, A. S. Kolomiytsev, B. G. Konoplev

Research output: Contribution to journalArticle

7 Citations (Scopus)

Fingerprint Dive into the research topics of 'Modeling of the substrate topography upon nanosized profiling by focused ion beams'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy