Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface

Z. Insepov, M. Sosnowski, G. H. Takaoka, I. Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Beams of energetic clusters may provide a unique tool for surface modification. Experimental data on the effects of cluster bombardment are still scarce but Molecular Dynamics Simulation may help guide the research in most promising directions. We modeled Ar cluster impact on gold surface and compared the calculated sputtering yield with the available experimental data at 30 keV. The results confirm the uniqueness of cluster impacts characterized by deposition of very high energy density at the surface.

Original languageEnglish
Title of host publicationMaterials Synthesis and Processing Using Ion Beams
EditorsAnthony F. Garito, Alex K-Y. Jen, Charles Y-C. Lee, Larry R. Dalton
PublisherMaterials Research Society
Pages999-1004
Number of pages6
Volume316
ISBN (Print)1558992154
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the MRS 1993 Fall Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Other

OtherProceedings of the MRS 1993 Fall Meeting
CityBoston, MA, USA
Period11/29/9312/3/93

Fingerprint

Molecular dynamics
Ions
Computer simulation
Gold
Sputtering
Surface treatment
Direction compound

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Insepov, Z., Sosnowski, M., Takaoka, G. H., & Yamada, I. (1994). Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface. In A. F. Garito, A. K-Y. Jen, C. Y-C. Lee, & L. R. Dalton (Eds.), Materials Synthesis and Processing Using Ion Beams (Vol. 316, pp. 999-1004). Materials Research Society.

Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface. / Insepov, Z.; Sosnowski, M.; Takaoka, G. H.; Yamada, I.

Materials Synthesis and Processing Using Ion Beams. ed. / Anthony F. Garito; Alex K-Y. Jen; Charles Y-C. Lee; Larry R. Dalton. Vol. 316 Materials Research Society, 1994. p. 999-1004.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Insepov, Z, Sosnowski, M, Takaoka, GH & Yamada, I 1994, Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface. in AF Garito, AK-Y Jen, CY-C Lee & LR Dalton (eds), Materials Synthesis and Processing Using Ion Beams. vol. 316, Materials Research Society, pp. 999-1004, Proceedings of the MRS 1993 Fall Meeting, Boston, MA, USA, 11/29/93.
Insepov Z, Sosnowski M, Takaoka GH, Yamada I. Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface. In Garito AF, Jen AK-Y, Lee CY-C, Dalton LR, editors, Materials Synthesis and Processing Using Ion Beams. Vol. 316. Materials Research Society. 1994. p. 999-1004
Insepov, Z. ; Sosnowski, M. ; Takaoka, G. H. ; Yamada, I. / Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface. Materials Synthesis and Processing Using Ion Beams. editor / Anthony F. Garito ; Alex K-Y. Jen ; Charles Y-C. Lee ; Larry R. Dalton. Vol. 316 Materials Research Society, 1994. pp. 999-1004
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