Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI)

Hellmut Haberland; Zinetulla Insepov; Michael Moseler

doi:10.1007/BF01429153

Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI)

Hellmut Haberland, Zinetulla Insepov, Michael Moseler

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Abstract

Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo₁₀₂₄ clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.

Original language	English
Pages (from-to)	229-231
Number of pages	3
Journal	Zeitschrift für Physik D Atoms, Molecules and Clusters
Volume	26
Issue number	1
DOIs	https://doi.org/10.1007/BF01429153
Publication status	Published - Mar 1 1993

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Keywords

36.40.+d
81.15.Jj
81.15.Rs

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Cite this

Haberland, H., Insepov, Z., & Moseler, M. (1993). Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI). Zeitschrift für Physik D Atoms, Molecules and Clusters, 26(1), 229-231. https://doi.org/10.1007/BF01429153

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Access to Document

10.1007/BF01429153