Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo1024 clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.
|Number of pages||3|
|Journal||Zeitschrift für Physik D Atoms, Molecules and Clusters|
|Publication status||Published - Mar 1 1993|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics