MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.

ILESANMI ADESIDA, LEONIDAS KARAPIPERIS

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Abstract

THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.

Original languageEnglish
Pages (from-to)223-233
Number of pages11
JournalRADIAT EFF
VolumeV 61
Issue numberN 3-4
DOIs
Publication statusPublished - 1982

ASJC Scopus subject areas

  • Engineering(all)

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