Nano-processing with gas cluster ion beams

Isao Yamada; Jiro Matsuo; Zinetulla Insepov; Takaaki Aoki; Toshio Seki; Noriaki Toyoda

doi:10.1016/S0168-583X(99)01163-5

Nano-processing with gas cluster ion beams

Isao Yamada, Jiro Matsuo, Zinetulla Insepov, Takaaki Aoki, Toshio Seki, Noriaki Toyoda

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Abstract

This paper describes the fundamental principles and experimental status of gas cluster ion beam (GCIB) processing as a new technique with promise for practical industrial applications. A review is presented of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and of related equipment development. The impacts of accelerated cluster ions upon substrate surfaces impart very high-energy densities in the impact regions of individual clusters and produce non-linear processes that are not present in the impacts of individual atomic ions. These unique bombardment characteristics are expected to facilitate new industrial applications that would not be possible by traditional ion beam processing. Among these are shallow ion implantation, high rate sputtering, surface cleaning and smoothing, and low-temperature thin film formation.

Original language	English
Pages (from-to)	944-959
Number of pages	16
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	164
DOIs	https://doi.org/10.1016/S0168-583X(99)01163-5
Publication status	Published - Apr 2000
Event	ICACS-18: 18th International Conference on Atomic Collisions in Solids - Odense, Denmark Duration: Aug 3 1999 → Aug 8 1999

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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abstract = "This paper describes the fundamental principles and experimental status of gas cluster ion beam (GCIB) processing as a new technique with promise for practical industrial applications. A review is presented of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and of related equipment development. The impacts of accelerated cluster ions upon substrate surfaces impart very high-energy densities in the impact regions of individual clusters and produce non-linear processes that are not present in the impacts of individual atomic ions. These unique bombardment characteristics are expected to facilitate new industrial applications that would not be possible by traditional ion beam processing. Among these are shallow ion implantation, high rate sputtering, surface cleaning and smoothing, and low-temperature thin film formation.",

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T1 - Nano-processing with gas cluster ion beams

AU - Yamada, Isao

AU - Matsuo, Jiro

AU - Insepov, Zinetulla

AU - Aoki, Takaaki

AU - Seki, Toshio

AU - Toyoda, Noriaki

PY - 2000/4

Y1 - 2000/4

N2 - This paper describes the fundamental principles and experimental status of gas cluster ion beam (GCIB) processing as a new technique with promise for practical industrial applications. A review is presented of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and of related equipment development. The impacts of accelerated cluster ions upon substrate surfaces impart very high-energy densities in the impact regions of individual clusters and produce non-linear processes that are not present in the impacts of individual atomic ions. These unique bombardment characteristics are expected to facilitate new industrial applications that would not be possible by traditional ion beam processing. Among these are shallow ion implantation, high rate sputtering, surface cleaning and smoothing, and low-temperature thin film formation.

AB - This paper describes the fundamental principles and experimental status of gas cluster ion beam (GCIB) processing as a new technique with promise for practical industrial applications. A review is presented of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and of related equipment development. The impacts of accelerated cluster ions upon substrate surfaces impart very high-energy densities in the impact regions of individual clusters and produce non-linear processes that are not present in the impacts of individual atomic ions. These unique bombardment characteristics are expected to facilitate new industrial applications that would not be possible by traditional ion beam processing. Among these are shallow ion implantation, high rate sputtering, surface cleaning and smoothing, and low-temperature thin film formation.

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DO - 10.1016/S0168-583X(99)01163-5

M3 - Conference article

AN - SCOPUS:0033733855

VL - 164

SP - 944

EP - 959

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

T2 - ICACS-18: 18th International Conference on Atomic Collisions in Solids

Y2 - 3 August 1999 through 8 August 1999

ER -