Nano-processing with gas cluster ion beams

Isao Yamada, Jiro Matsuo, Zinetulla Insepov, Takaaki Aoki, Toshio Seki, Noriaki Toyoda

Research output: Contribution to journalArticle

91 Citations (Scopus)

Abstract

This paper describes the fundamental principles and experimental status of gas cluster ion beam (GCIB) processing as a new technique with promise for practical industrial applications. A review is presented of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and of related equipment development. The impacts of accelerated cluster ions upon substrate surfaces impart very high-energy densities in the impact regions of individual clusters and produce non-linear processes that are not present in the impacts of individual atomic ions. These unique bombardment characteristics are expected to facilitate new industrial applications that would not be possible by traditional ion beam processing. Among these are shallow ion implantation, high rate sputtering, surface cleaning and smoothing, and low-temperature thin film formation.

Original languageEnglish
Pages (from-to)944-959
Number of pages16
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume164
DOIs
Publication statusPublished - Apr 2000
Externally publishedYes

Fingerprint

Ion beams
Industrial applications
Gases
ion beams
Ions
Surface cleaning
Ion bombardment
Processing
gases
Ion implantation
Sputtering
bombardment
Thin films
ions
Substrates
smoothing
cleaning
ion implantation
flux density
sputtering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Nano-processing with gas cluster ion beams. / Yamada, Isao; Matsuo, Jiro; Insepov, Zinetulla; Aoki, Takaaki; Seki, Toshio; Toyoda, Noriaki.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 164, 04.2000, p. 944-959.

Research output: Contribution to journalArticle

Yamada, Isao ; Matsuo, Jiro ; Insepov, Zinetulla ; Aoki, Takaaki ; Seki, Toshio ; Toyoda, Noriaki. / Nano-processing with gas cluster ion beams. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2000 ; Vol. 164. pp. 944-959.
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