Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography

Michael J. Word, Ilesanmi Adesida, Paul R. Berger

Research output: Contribution to journalArticlepeer-review

73 Citations (Scopus)
Original languageEnglish
Pages (from-to)L12-L15
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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