New multichamber evaporator for organic devices

Qiu Lai Wang, Wei Ling Guo, Michael C Y Chan, Shi Chuang Liu, E. Herbert Li, C. Surya

Research output: Contribution to journalConference articlepeer-review


A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density or thickness OLED at the same fabrication. The chamber three is vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LiF, Ca and Al, Au.

Original languageEnglish
Pages (from-to)289-291
Number of pages3
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Jan 1 2000
Externally publishedYes
EventOptoelectronic Materials and Devices II - Taipei, Taiwan
Duration: Jul 26 2000Jul 28 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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