New multichamber evaporator for organic devices

Qiu Lai Wang; Wei Ling Guo; Michael C Y Chan; Shi Chuang Liu; E. Herbert Li; C. Surya

doi:10.1117/12.392153

New multichamber evaporator for organic devices

Qiu Lai Wang, Wei Ling Guo, Michael C Y Chan, Shi Chuang Liu, E. Herbert Li, C. Surya

Research output: Contribution to journal › Conference article › peer-review

Abstract

A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density or thickness OLED at the same fabrication. The chamber three is vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LiF, Ca and Al, Au.

Original language	English
Pages (from-to)	289-291
Number of pages	3
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4078
DOIs	https://doi.org/10.1117/12.392153
Publication status	Published - Jan 1 2000
Externally published	Yes
Event	Optoelectronic Materials and Devices II - Taipei, Taiwan Duration: Jul 26 2000 → Jul 28 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "New multichamber evaporator for organic devices",

abstract = "A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density or thickness OLED at the same fabrication. The chamber three is vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LiF, Ca and Al, Au.",

author = "Wang, {Qiu Lai} and Guo, {Wei Ling} and Chan, {Michael C Y} and Liu, {Shi Chuang} and Li, {E. Herbert} and C. Surya",

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doi = "10.1117/12.392153",

language = "English",

volume = "4078",

pages = "289--291",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Optoelectronic Materials and Devices II ; Conference date: 26-07-2000 Through 28-07-2000",

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T1 - New multichamber evaporator for organic devices

AU - Wang, Qiu Lai

AU - Guo, Wei Ling

AU - Chan, Michael C Y

AU - Liu, Shi Chuang

AU - Li, E. Herbert

AU - Surya, C.

PY - 2000/1/1

Y1 - 2000/1/1

N2 - A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density or thickness OLED at the same fabrication. The chamber three is vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LiF, Ca and Al, Au.

AB - A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density or thickness OLED at the same fabrication. The chamber three is vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LiF, Ca and Al, Au.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Optoelectronic Materials and Devices II

Y2 - 26 July 2000 through 28 July 2000

ER -

New multichamber evaporator for organic devices

Abstract

ASJC Scopus subject areas

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