Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors

Sven Poeggel, Daniele Tosi, Dineshbabu Duraibabu, James Kelly, Maria Munroe, Gabriel Leen, Elfed Lewis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper new algorithms and procedures are reported which enable miniaturization and optimization of the thickness of a diaphragm for an all-glass extrinsic Fabry-Perot interferometer (EFPI)-based pressure sensor. Diaphragm etching improves the EFPI sensors ability to detect relatively small changes in pressure (0.1mmHg) and the resulting sensor exhibits excellent stability over time (drift <1 mmHg / hour) for measurement in air and liquid. The diaphragm etching procedure involves fiber polishing followed by etching in hydrofluoric (HF) acid. An additional Ion-beam etching technique was investigated separately to compare with the HF-etching technique. A sensitivity better than 10 10 nm/kPa, which provides a pressure resolution of 0.05mmHg, is achieved by reducing the EFPI diaphragm thickness down to less than 2μm for the miniature pressure sensor used in this investigation (overall diameter of 200μm). The techniques reported is also applicable for the fabrication of high sensitivity sensors using a smaller fiber diameter e.g. 80μm.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume9098
ISBN (Print)9781628410358
DOIs
Publication statusPublished - 2014
Externally publishedYes
EventFiber Optic Sensors and Applications XI - Baltimore, MD, United States
Duration: May 8 2014May 9 2014

Other

OtherFiber Optic Sensors and Applications XI
CountryUnited States
CityBaltimore, MD
Period5/8/145/9/14

Fingerprint

Microfabrication
Fabry-Perot
diaphragms
Etching
Diaphragms
Fiber Optics
Fiber optics
fiber optics
Fabry-Perot Interferometer
Fabry-Perot interferometers
etching
Sensor
sensitivity
sensors
Sensors
Pressure Sensor
Pressure sensors
pressure sensors
Fiber
Hydrofluoric Acid

Keywords

  • all glass
  • biomedical application
  • Fabry Perot Interferometer (FPI)
  • high sensitivity
  • hydrofluoric (HF) acid
  • Optical fibre pressure and temperature sensor (OFPTS)

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Poeggel, S., Tosi, D., Duraibabu, D., Kelly, J., Munroe, M., Leen, G., & Lewis, E. (2014). Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 9098). [909813] SPIE. https://doi.org/10.1117/12.2050500

Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors. / Poeggel, Sven; Tosi, Daniele; Duraibabu, Dineshbabu; Kelly, James; Munroe, Maria; Leen, Gabriel; Lewis, Elfed.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9098 SPIE, 2014. 909813.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Poeggel, S, Tosi, D, Duraibabu, D, Kelly, J, Munroe, M, Leen, G & Lewis, E 2014, Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 9098, 909813, SPIE, Fiber Optic Sensors and Applications XI, Baltimore, MD, United States, 5/8/14. https://doi.org/10.1117/12.2050500
Poeggel S, Tosi D, Duraibabu D, Kelly J, Munroe M, Leen G et al. Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9098. SPIE. 2014. 909813 https://doi.org/10.1117/12.2050500
Poeggel, Sven ; Tosi, Daniele ; Duraibabu, Dineshbabu ; Kelly, James ; Munroe, Maria ; Leen, Gabriel ; Lewis, Elfed. / Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9098 SPIE, 2014.
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