Optical constants and polarimetric properties of AlN thin films

Yu A. Ushenko, P. D. Maryanchuk, M. M. Solovan, L. J. Pidkamin, V. V. Brus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The results of an experimental study of the polarization characteristics of thin films based on aluminum nitride (AlN) are presented. It was found that an increase in the partial pressure of nitrogen (with the appropriate technology for producing the AlN film) leads to a substantial increase in the absorptivity of the film itself and a decrease in its linear dichroism parameter.

Original languageEnglish
Title of host publicationThirteenth International Conference on Correlation Optics
EditorsOleg V. Angelsky
PublisherSPIE
ISBN (Electronic)9781510617278
DOIs
Publication statusPublished - 2018
Externally publishedYes
Event13th International Conference on Correlation Optics - Chernivtsi, Ukraine
Duration: Sep 11 2017Sep 15 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10612
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference13th International Conference on Correlation Optics
CountryUkraine
CityChernivtsi
Period9/11/179/15/17

Keywords

  • Biological layers
  • Diagnostic
  • Interference
  • Mueller matrix

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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