Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

B. Uzakbaiuly; A. Mukanova; I. Kurmanbayeva; Z. B. Bakenov

doi:10.29317/EJPFM.2019030209

Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

B. Uzakbaiuly, A. Mukanova, I. Kurmanbayeva, Z. B. Bakenov

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li₃PO₄ target. The optimal deposition parameters were deter-mined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, N_d, and possibly triply, N_t, coordinated form. The ac impedance spectroscopy mea-surements revealed that the highest ionic conductivity of 1.1 μScm⁻¹ was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.

Original language	English
Pages (from-to)	174-182
Number of pages	9
Journal	Eurasian Journal of Physics and Functional Materials
Volume	3
Issue number	2
DOIs	https://doi.org/10.29317/EJPFM.2019030209
Publication status	Published - 2019

Keywords

LIPON
PVD
RF sputtering
thin film

ASJC Scopus subject areas

Nuclear and High Energy Physics
Radiation
Condensed Matter Physics
Physics and Astronomy (miscellaneous)
Materials Science (miscellaneous)

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10.29317/EJPFM.2019030209

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@article{3331b72eae3b4fa6b60c0aea8b51c658,

title = "Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)",

abstract = "Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were deter-mined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd, and possibly triply, Nt, coordinated form. The ac impedance spectroscopy mea-surements revealed that the highest ionic conductivity of 1.1 μScm−1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.",

keywords = "LIPON, PVD, RF sputtering, thin film",

author = "B. Uzakbaiuly and A. Mukanova and I. Kurmanbayeva and Bakenov, {Z. B.}",

note = "Funding Information: This research was funded under the research grant AP05133519 {"}Development of 3-dimensional thin film silicon based anode materials for next generation lithium-ion microbatteries{"} from the Ministry of Education and Science of the Republic of Kazakhstan. Publisher Copyright: {\textcopyright} 2019, Eurasian Journal of Physics and Functional Materials. All Rights Reserved.",

year = "2019",

doi = "10.29317/EJPFM.2019030209",

language = "English",

volume = "3",

pages = "174--182",

journal = "Eurasian Journal of Physics and Functional Materials",

issn = "2522-9869",

publisher = "L. N. Gumilyov Eurasian National University",

number = "2",

}

TY - JOUR

T1 - Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

AU - Uzakbaiuly, B.

AU - Mukanova, A.

AU - Kurmanbayeva, I.

AU - Bakenov, Z. B.

N1 - Funding Information: This research was funded under the research grant AP05133519 "Development of 3-dimensional thin film silicon based anode materials for next generation lithium-ion microbatteries" from the Ministry of Education and Science of the Republic of Kazakhstan. Publisher Copyright: © 2019, Eurasian Journal of Physics and Functional Materials. All Rights Reserved.

PY - 2019

Y1 - 2019

N2 - Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were deter-mined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd, and possibly triply, Nt, coordinated form. The ac impedance spectroscopy mea-surements revealed that the highest ionic conductivity of 1.1 μScm−1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.

AB - Thin film of lithium phosphorus oxynitride (LIPON) was successfully deposited by radio frequency (RF) magnetron sputtering technique using a Li3PO4 target. The optimal deposition parameters were deter-mined for the thin films with the highest target-substrate distance. Characterization of deposited film was carried out by AFM, FTIR and Raman spectroscopy, which showed incorporation of nitrogen into the film as both doubly, Nd, and possibly triply, Nt, coordinated form. The ac impedance spectroscopy mea-surements revealed that the highest ionic conductivity of 1.1 μScm−1 was achieved at room temperature for the samples prepared at the optimum RF power and gas flow conditions.

KW - LIPON

KW - PVD

KW - RF sputtering

KW - thin film

UR - http://www.scopus.com/inward/record.url?scp=85102799059&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85102799059&partnerID=8YFLogxK

U2 - 10.29317/EJPFM.2019030209

DO - 10.29317/EJPFM.2019030209

M3 - Article

AN - SCOPUS:85102799059

VL - 3

SP - 174

EP - 182

JO - Eurasian Journal of Physics and Functional Materials

JF - Eurasian Journal of Physics and Functional Materials

SN - 2522-9869

IS - 2

ER -

Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)

Abstract

Keywords

ASJC Scopus subject areas

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