Parallel unstructured dynamic grid direct Monte Carlo simulation of molecular gas dynamics and its applications

Abhinav Singh, Yong Zhao

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A new parallel dynamic unstructured grid DSMC method is presented in this paper. The code developed has been applied to the simulation of thin film deposition over microstructures. Surface deformation in such cases poses a challenge for accurate evaluation of gas flow due to the fact that the deposited film thickness is comparable to the feature size. In this study a method is developed to move the mesh at run time. Since in parallel simulation each partition moves independently of the others, a parallel version of moving mesh is proposed to synchronize the displacement of the neighboring partitions, so that there is a smooth transition from one partition to another. An efficient tool for tracking particles during simulation is also presented. Furthermore, the influence of parameters, such as sticking coefficient and aspect ratio on step coverage for a 1μm wide trench by sputter deposition was studied. The results showed that the step coverage deteriorated with increasing sticking coefficient and aspect ratio.

Original languageEnglish
Pages (from-to)553-568
Number of pages16
JournalJournal of Scientific Computing
Volume16
Issue number4
Publication statusPublished - 2001
Externally publishedYes

Fingerprint

Direct Simulation Monte Carlo
Gas dynamics
Gas Dynamics
Molecular Dynamics
Aspect ratio
Partition
Grid
Aspect Ratio
Sputter deposition
Coverage
Moving Mesh
Flow of gases
Film thickness
Particle Tracking
Parallel Simulation
Unstructured Grid
Coefficient
Gas Flow
Thin films
Microstructure

Keywords

  • DSMC
  • Dynamic unstructured grid
  • Parallel computing
  • Thin film deposition

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Hardware and Architecture
  • Software

Cite this

Parallel unstructured dynamic grid direct Monte Carlo simulation of molecular gas dynamics and its applications. / Singh, Abhinav; Zhao, Yong.

In: Journal of Scientific Computing, Vol. 16, No. 4, 2001, p. 553-568.

Research output: Contribution to journalArticle

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