Keyphrases
Aspect Ratio
100%
Direct Simulation Monte Carlo
100%
Sticking Coefficient
100%
Molecular Gas Dynamics
100%
Step Coverage
100%
Unstructured Dynamic Grid
100%
Coefficient Ratio
100%
Microstructure
50%
Sputter Deposition
50%
Parameter Influence
50%
Parallel Simulation
50%
Gas Flow
50%
Film Thickness
50%
Wide Trench
50%
Accurate Evaluation
50%
Deposited Film
50%
Parallel Version
50%
DSMC Method
50%
Tracking Particles
50%
Thin Film Deposition
50%
Smooth Transition
50%
Parallel Dynamics
50%
Dynamic Unstructured Grid
50%
Surface Deformation
50%
Moving Mesh
50%
INIS
applications
100%
simulation
100%
gases
100%
grids
100%
dynamics
100%
monte carlo method
100%
partition
75%
deposition
50%
aspect ratio
50%
size
25%
surfaces
25%
tools
25%
thickness
25%
evaluation
25%
films
25%
increasing
25%
particles
25%
deformation
25%
thin films
25%
microstructure
25%
sputtering
25%
gas flow
25%
Engineering
Aspect Ratio
100%
Aerodynamics
100%
Microstructure
50%
Thin Films
50%
Gas Flow
50%
Deposited Film
50%
Parallel Version
50%
Surface Deformation
50%
Moving Mesh
50%
Feature Size
50%
Computer Science
Monte Carlo Simulation
100%
Parallel Simulation
100%
Unstructured Grid
100%
Parallel Version
100%
Mathematics
Direct Simulation Monte Carlo
100%
Aspect-Ratio
100%