Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing

A. Singh, Z. Yong

Research output: Contribution to journalArticlepeer-review

Abstract

This paper describes the implementation aspects of a two dimensional, unstructured grid based Direct Simulation Monte Carlo (DSMC) flow solver for the study of molecular gas dynamics found in thin film deposition processes. A localized data structure based on domain decomposition is developed to improve the particle/molecule tracking, which is otherwise computationally intensive. The method has been implemented on a massively parallel computing platform for shortened simulation time. Results are validated against known analytical solutions and published results. Furthermore, the influence of parameters, such as sticking coefficient and aspect ratio for step coverage on a 1μm wide trench by sputter deposition was studied. The results show that the step coverage deteriorates with increasing sticking coefficient and aspect ratio.

Original languageEnglish
Pages (from-to)290-301
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4228
DOIs
Publication statusPublished - 2000
Externally publishedYes

Keywords

  • Direct simulation Monte Carlo
  • Parallel computing
  • Rarefield gas dynamics
  • Thin film
  • Unstructured grid/mesh

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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