Photonic metasurface made of array of lens-like SiGe Mie resonators formed on (100) Si substrate via dewetting

Vladimir Poborchii, Alexander Shklyaev, Leonid Bolotov, Noriyuki Uchida, Tetsuya Tada, Zhandos N. Utegulov

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Metasurfaces consisting of arrays of high-index Mie resonators concentrating/redirecting light are important for integrated optics, photodetectors, and solar cells. Herein, we report the optical properties of low-Ge-content SiGe lens-like Mie resonator island arrays fabricated via dewetting during Ge deposition on a Si(100) surface at approximately 900 °C. We observe enhancement of the Si interaction with light owing to the efficient island-induced light concentration in the submicron-depth Si layer, which is mediated by both near-field Mie resonance leaking into the substrate and far-field light focusing. Such metasurfaces can improve the Si photodetector and solar-cell performance.

Original languageEnglish
Article number125501
JournalApplied Physics Express
Volume10
Issue number12
DOIs
Publication statusPublished - Dec 1 2017

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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