Physical Vapor Deposition of Cathode Materials for All Solid-State Li Ion Batteries: A Review

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3 Citations (Scopus)


With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode–electrolyte interface, are discussed.

Original languageEnglish
Article number625123
JournalFrontiers in Energy Research
Publication statusPublished - May 28 2021


  • cathode
  • Li ion batteries
  • physical vapor deposition
  • thermal evaporation
  • thin-film batteries

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Energy Engineering and Power Technology
  • Economics and Econometrics


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