Original language | English |
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Title of host publication | Hybrid Micromachining and Microfabrication Technologies |
Subtitle of host publication | Principles, Varieties and Applications |
Publisher | wiley |
Pages | xv-xvii |
ISBN (Electronic) | 9781394174959 |
ISBN (Print) | 9781394174478 |
Publication status | Published - Jan 1 2023 |
ASJC Scopus subject areas
- General Engineering