Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process

Farabi Bozheyev, Dennis Friedrich, Man Nie, Mythili Rengachari, Klaus Ellmer

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Highly (001)-textured tungsten diselenide WSe2 thin films have been prepared by a two-step process on quartz glass and TiN metallic back contacts, respectively. At first, X-ray amorphous, selenium-rich WSe2+x films were deposited by reactive magnetron sputtering at room temperature onto a thin metal promoter film (Ni or Pd) and afterwards annealed in an H2Se/Ar atmosphere. X-ray diffraction and scanning electron microscopy show that highly (001)-oriented WSe2 films can be grown, which is caused by the formation of liquid promoter-metal selenide droplets which dissolve tungsten or tungsten selenide at temperatures, higher than the eutectic temperature in the promoter metal-selenium system, followed by oversaturation and eventually crystallization of WSe2 platelets. Time-resolved microwave conductivity measurements show that the films are photoactive. The sum of the carrier mobilities of the best films μe + μh is in the range of 1-7 cm2 V-1 s-1.

Original languageEnglish
Pages (from-to)2013-2019
Number of pages7
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume211
Issue number9
DOIs
Publication statusPublished - Jan 1 2014

Fingerprint

Tungsten
Crystallization
tungsten
crystallization
Crystalline materials
preparation
selenides
Liquids
liquids
selenium
Selenium
Metals
liquid metals
carrier mobility
platelets
metal films
Quartz
eutectics
Reactive sputtering
Carrier mobility

Keywords

  • dichalcogenides
  • magnetron sputtering
  • rapid crystallization
  • WSe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process. / Bozheyev, Farabi; Friedrich, Dennis; Nie, Man; Rengachari, Mythili; Ellmer, Klaus.

In: Physica Status Solidi (A) Applications and Materials Science, Vol. 211, No. 9, 01.01.2014, p. 2013-2019.

Research output: Contribution to journalArticle

@article{2093ba5c80cc4cc5801389549f7b412e,
title = "Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process",
abstract = "Highly (001)-textured tungsten diselenide WSe2 thin films have been prepared by a two-step process on quartz glass and TiN metallic back contacts, respectively. At first, X-ray amorphous, selenium-rich WSe2+x films were deposited by reactive magnetron sputtering at room temperature onto a thin metal promoter film (Ni or Pd) and afterwards annealed in an H2Se/Ar atmosphere. X-ray diffraction and scanning electron microscopy show that highly (001)-oriented WSe2 films can be grown, which is caused by the formation of liquid promoter-metal selenide droplets which dissolve tungsten or tungsten selenide at temperatures, higher than the eutectic temperature in the promoter metal-selenium system, followed by oversaturation and eventually crystallization of WSe2 platelets. Time-resolved microwave conductivity measurements show that the films are photoactive. The sum of the carrier mobilities of the best films μe + μh is in the range of 1-7 cm2 V-1 s-1.",
keywords = "dichalcogenides, magnetron sputtering, rapid crystallization, WSe",
author = "Farabi Bozheyev and Dennis Friedrich and Man Nie and Mythili Rengachari and Klaus Ellmer",
year = "2014",
month = "1",
day = "1",
doi = "10.1002/pssa.201400016",
language = "English",
volume = "211",
pages = "2013--2019",
journal = "Physica Status Solidi (A) Applications and Materials Science",
issn = "1862-6300",
publisher = "Wiley-VCH Verlag",
number = "9",

}

TY - JOUR

T1 - Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process

AU - Bozheyev, Farabi

AU - Friedrich, Dennis

AU - Nie, Man

AU - Rengachari, Mythili

AU - Ellmer, Klaus

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Highly (001)-textured tungsten diselenide WSe2 thin films have been prepared by a two-step process on quartz glass and TiN metallic back contacts, respectively. At first, X-ray amorphous, selenium-rich WSe2+x films were deposited by reactive magnetron sputtering at room temperature onto a thin metal promoter film (Ni or Pd) and afterwards annealed in an H2Se/Ar atmosphere. X-ray diffraction and scanning electron microscopy show that highly (001)-oriented WSe2 films can be grown, which is caused by the formation of liquid promoter-metal selenide droplets which dissolve tungsten or tungsten selenide at temperatures, higher than the eutectic temperature in the promoter metal-selenium system, followed by oversaturation and eventually crystallization of WSe2 platelets. Time-resolved microwave conductivity measurements show that the films are photoactive. The sum of the carrier mobilities of the best films μe + μh is in the range of 1-7 cm2 V-1 s-1.

AB - Highly (001)-textured tungsten diselenide WSe2 thin films have been prepared by a two-step process on quartz glass and TiN metallic back contacts, respectively. At first, X-ray amorphous, selenium-rich WSe2+x films were deposited by reactive magnetron sputtering at room temperature onto a thin metal promoter film (Ni or Pd) and afterwards annealed in an H2Se/Ar atmosphere. X-ray diffraction and scanning electron microscopy show that highly (001)-oriented WSe2 films can be grown, which is caused by the formation of liquid promoter-metal selenide droplets which dissolve tungsten or tungsten selenide at temperatures, higher than the eutectic temperature in the promoter metal-selenium system, followed by oversaturation and eventually crystallization of WSe2 platelets. Time-resolved microwave conductivity measurements show that the films are photoactive. The sum of the carrier mobilities of the best films μe + μh is in the range of 1-7 cm2 V-1 s-1.

KW - dichalcogenides

KW - magnetron sputtering

KW - rapid crystallization

KW - WSe

UR - http://www.scopus.com/inward/record.url?scp=85027945699&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85027945699&partnerID=8YFLogxK

U2 - 10.1002/pssa.201400016

DO - 10.1002/pssa.201400016

M3 - Article

AN - SCOPUS:85027945699

VL - 211

SP - 2013

EP - 2019

JO - Physica Status Solidi (A) Applications and Materials Science

JF - Physica Status Solidi (A) Applications and Materials Science

SN - 1862-6300

IS - 9

ER -