Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

Zinetulla Insepov, Rafael Manory, Jiro Matsuo, Isao Yamada

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

Large gas-cluster-ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. A hardness measurement technique is proposed in this paper based on the use of the effect of crater formation by large gas-cluster beams. The cluster impact leaves a hemispherical crater on a surface, the size of which varies with surface hardness and cluster parameters (which can be predetermined). As shown in this paper, the crater depth h (or diameter d) and Brinell hardness B are correlated through the formula h∼(E/B)1/3, where E is the cluster acceleration energy. The material hardness, binding energy, and the crater size have also been correlated with the sputtering yield Y, and hence this correlation can also be experimentally applied for measuring hardness. The proposed method is based entirely on surface effects which depend only on the surface material and not on the substrate and therefore should be particularly suitable for measuring hardness of thin deposited films. This technique also eliminates the need for indentors that are harder than the material measured.

Original languageEnglish
Pages (from-to)8744-8752
Number of pages9
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume61
Issue number13
Publication statusPublished - Apr 1 2000
Externally publishedYes

Fingerprint

proposals
bombardment
hardness
Gases
Hardness
craters
gases
Ion bombardment
Binding energy
leaves
Sputtering
binding energy
sputtering
energy
Substrates
thin films
ions

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment. / Insepov, Zinetulla; Manory, Rafael; Matsuo, Jiro; Yamada, Isao.

In: Physical Review B - Condensed Matter and Materials Physics, Vol. 61, No. 13, 01.04.2000, p. 8744-8752.

Research output: Contribution to journalArticle

@article{0b6aa81d9301439e8ab288d35ce74624,
title = "Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment",
abstract = "Large gas-cluster-ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. A hardness measurement technique is proposed in this paper based on the use of the effect of crater formation by large gas-cluster beams. The cluster impact leaves a hemispherical crater on a surface, the size of which varies with surface hardness and cluster parameters (which can be predetermined). As shown in this paper, the crater depth h (or diameter d) and Brinell hardness B are correlated through the formula h∼(E/B)1/3, where E is the cluster acceleration energy. The material hardness, binding energy, and the crater size have also been correlated with the sputtering yield Y, and hence this correlation can also be experimentally applied for measuring hardness. The proposed method is based entirely on surface effects which depend only on the surface material and not on the substrate and therefore should be particularly suitable for measuring hardness of thin deposited films. This technique also eliminates the need for indentors that are harder than the material measured.",
author = "Zinetulla Insepov and Rafael Manory and Jiro Matsuo and Isao Yamada",
year = "2000",
month = "4",
day = "1",
language = "English",
volume = "61",
pages = "8744--8752",
journal = "Physical Review B",
issn = "1098-0121",
publisher = "American Physical Society",
number = "13",

}

TY - JOUR

T1 - Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

AU - Insepov, Zinetulla

AU - Manory, Rafael

AU - Matsuo, Jiro

AU - Yamada, Isao

PY - 2000/4/1

Y1 - 2000/4/1

N2 - Large gas-cluster-ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. A hardness measurement technique is proposed in this paper based on the use of the effect of crater formation by large gas-cluster beams. The cluster impact leaves a hemispherical crater on a surface, the size of which varies with surface hardness and cluster parameters (which can be predetermined). As shown in this paper, the crater depth h (or diameter d) and Brinell hardness B are correlated through the formula h∼(E/B)1/3, where E is the cluster acceleration energy. The material hardness, binding energy, and the crater size have also been correlated with the sputtering yield Y, and hence this correlation can also be experimentally applied for measuring hardness. The proposed method is based entirely on surface effects which depend only on the surface material and not on the substrate and therefore should be particularly suitable for measuring hardness of thin deposited films. This technique also eliminates the need for indentors that are harder than the material measured.

AB - Large gas-cluster-ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. A hardness measurement technique is proposed in this paper based on the use of the effect of crater formation by large gas-cluster beams. The cluster impact leaves a hemispherical crater on a surface, the size of which varies with surface hardness and cluster parameters (which can be predetermined). As shown in this paper, the crater depth h (or diameter d) and Brinell hardness B are correlated through the formula h∼(E/B)1/3, where E is the cluster acceleration energy. The material hardness, binding energy, and the crater size have also been correlated with the sputtering yield Y, and hence this correlation can also be experimentally applied for measuring hardness. The proposed method is based entirely on surface effects which depend only on the surface material and not on the substrate and therefore should be particularly suitable for measuring hardness of thin deposited films. This technique also eliminates the need for indentors that are harder than the material measured.

UR - http://www.scopus.com/inward/record.url?scp=0001414972&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001414972&partnerID=8YFLogxK

M3 - Article

VL - 61

SP - 8744

EP - 8752

JO - Physical Review B

JF - Physical Review B

SN - 1098-0121

IS - 13

ER -