Protective coatings with nanoscale multilayer architecture: Current state and main trends

Binary systems (layers) and multicomponent layers with bilayer thicknesses varying from microns to a few nan- ometers are considered. A strong dependence of the micro- structure formation on the deposition conditions (the magnitude of the bias potential, the flow of inert and reactive gases, the ion beam power (current density) supplied to the target) is found. General regularities in the change in the functional properties and structural state of the coatings are formulated. The conditions for the formation of a columnar structure and growth texture are noted; various mechanisms and their interpretation are proposed. The relationship among the size of nanograins, diffusion at the interphase boundary, and effects determining the physico-mechanical, tribological characteristics, as well as resistance to corrosion and oxida- tion, is shown.