RESIST EXPOSURE WITH LIGHT IONS.

I. Adesida, C. Anderson, E. D. Wolf

Research output: Contribution to journalConference article

20 Citations (Scopus)

Abstract

Radiation yields or G//s-values in polymethylmethacrylate (PMMA), which are the number of chain scissions per 100 ev of absorbed energy, due to irradiation with electrons, protons, and helium, lithium, beryllium, and boron ions have been measured. G//s values for protons and electrons are the same at approximately equals 0. 75, while those of helium, lithium, beryllium, and boron ions are 0. 45, 0. 44, 0. 40, and 0. 45, respectively. Initial results on sensitivities and mean pathlengths of ions in PMMA obtained from solubility studies are also presented.

Original languageEnglish
Pages (from-to)1182-1185
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume1
Issue number4
DOIs
Publication statusPublished - Jan 1 1983
EventProc of the Int Symp on Electron, Ion and Photon Beams - Los Angeles, CA, USA
Duration: May 31 1983Jun 3 1983

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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