Simulation of cluster impacts on silicon surface

Z. Insepov, M. Sosnowski, I. Yamada

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

A new hybrid model, combining Molecular Dynamics (MD) with continuum mechanics and thermodynamics, has been developed for studying collisions of energetic particles with a solid surface. MD describes interaction of atoms in the central impact zone characterized by energetic atomic collisions and non-equilibrium states of matter while the continuum model is applied to a much larger volume outside. Appropriate boundary conditions at the interface of the two regions prevent the appearance of unphysical shock wave reflections. The hybrid model is very efficient in computations as it reduces the number of the system's degrees of freedom by minimizing the size of the central MD zone. The model was applied to collisions of a few keV Ar clusters containing approximately 100 atoms with Si(100) surface. The results show that cluster impacts create craters and local melting and that a number of displaced surface atoms have large lateral velocities. The latter may explain the experimentally observed surface smoothing by cluster bombardment.

Original languageEnglish
Pages (from-to)269-272
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume127-128
Publication statusPublished - May 1997
Externally publishedYes

Fingerprint

Silicon
Molecular dynamics
silicon
molecular dynamics
Atoms
simulation
atoms
continuum mechanics
atomic collisions
Continuum mechanics
collisions
wave reflection
energetic particles
craters
smoothing
solid surfaces
Shock waves
bombardment
shock waves
Melting

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Simulation of cluster impacts on silicon surface. / Insepov, Z.; Sosnowski, M.; Yamada, I.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 127-128, 05.1997, p. 269-272.

Research output: Contribution to journalArticle

@article{d12622fb6cdf4ecf8cf78ecb4e39973c,
title = "Simulation of cluster impacts on silicon surface",
abstract = "A new hybrid model, combining Molecular Dynamics (MD) with continuum mechanics and thermodynamics, has been developed for studying collisions of energetic particles with a solid surface. MD describes interaction of atoms in the central impact zone characterized by energetic atomic collisions and non-equilibrium states of matter while the continuum model is applied to a much larger volume outside. Appropriate boundary conditions at the interface of the two regions prevent the appearance of unphysical shock wave reflections. The hybrid model is very efficient in computations as it reduces the number of the system's degrees of freedom by minimizing the size of the central MD zone. The model was applied to collisions of a few keV Ar clusters containing approximately 100 atoms with Si(100) surface. The results show that cluster impacts create craters and local melting and that a number of displaced surface atoms have large lateral velocities. The latter may explain the experimentally observed surface smoothing by cluster bombardment.",
author = "Z. Insepov and M. Sosnowski and I. Yamada",
year = "1997",
month = "5",
language = "English",
volume = "127-128",
pages = "269--272",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Simulation of cluster impacts on silicon surface

AU - Insepov, Z.

AU - Sosnowski, M.

AU - Yamada, I.

PY - 1997/5

Y1 - 1997/5

N2 - A new hybrid model, combining Molecular Dynamics (MD) with continuum mechanics and thermodynamics, has been developed for studying collisions of energetic particles with a solid surface. MD describes interaction of atoms in the central impact zone characterized by energetic atomic collisions and non-equilibrium states of matter while the continuum model is applied to a much larger volume outside. Appropriate boundary conditions at the interface of the two regions prevent the appearance of unphysical shock wave reflections. The hybrid model is very efficient in computations as it reduces the number of the system's degrees of freedom by minimizing the size of the central MD zone. The model was applied to collisions of a few keV Ar clusters containing approximately 100 atoms with Si(100) surface. The results show that cluster impacts create craters and local melting and that a number of displaced surface atoms have large lateral velocities. The latter may explain the experimentally observed surface smoothing by cluster bombardment.

AB - A new hybrid model, combining Molecular Dynamics (MD) with continuum mechanics and thermodynamics, has been developed for studying collisions of energetic particles with a solid surface. MD describes interaction of atoms in the central impact zone characterized by energetic atomic collisions and non-equilibrium states of matter while the continuum model is applied to a much larger volume outside. Appropriate boundary conditions at the interface of the two regions prevent the appearance of unphysical shock wave reflections. The hybrid model is very efficient in computations as it reduces the number of the system's degrees of freedom by minimizing the size of the central MD zone. The model was applied to collisions of a few keV Ar clusters containing approximately 100 atoms with Si(100) surface. The results show that cluster impacts create craters and local melting and that a number of displaced surface atoms have large lateral velocities. The latter may explain the experimentally observed surface smoothing by cluster bombardment.

UR - http://www.scopus.com/inward/record.url?scp=0031547823&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031547823&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031547823

VL - 127-128

SP - 269

EP - 272

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -