Sputterring and smoothing of metal surface with energetic gas cluster beams

Z. Insepov, I. Yamada, M. Sosnowski

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Sputtering is a process of surface erosion by energetic ions. One of the remarkable effects of sputtering with cluster ions is surface smoothing. To understand its mechanism we have developed a computational model, which utilizes molecular dynamics (MD) to simulate rapid atomic collisions in the central impact zone, and a finite-difference method to account for processes occurring on a longer time scale over a wider target area. A case of gas cluster of a few hundred Ar atoms impacting a Cu target with energy up to 20 keV has been considered. The MD simulation has revealed that the atoms ejected from the surface have a significant lateral momentum component (parallel to the surface) which may have a major effect on surface morphology. Evolution of surface morphology under cluster ion irradiation was described by the modified Kuramoto-Sivashinsky equation. Comparison of the simulations with experimental data shows qualitative agreement.

Original languageEnglish
Pages (from-to)234-237
Number of pages4
JournalMaterials Chemistry and Physics
Volume54
Issue number1-3
Publication statusPublished - Jul 1998
Externally publishedYes

Fingerprint

smoothing
metal surfaces
Gases
Metals
gases
Surface morphology
Sputtering
Molecular dynamics
Ions
Atoms
Ion bombardment
sputtering
Finite difference method
molecular dynamics
Erosion
Momentum
atomic collisions
ion irradiation
erosion
atoms

Keywords

  • Cluster ions
  • Impact
  • Molecular dynamics
  • Surface morphology

ASJC Scopus subject areas

  • Materials Chemistry

Cite this

Sputterring and smoothing of metal surface with energetic gas cluster beams. / Insepov, Z.; Yamada, I.; Sosnowski, M.

In: Materials Chemistry and Physics, Vol. 54, No. 1-3, 07.1998, p. 234-237.

Research output: Contribution to journalArticle

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