Abstract
Sputtering is a process of surface erosion by energetic ions. One of the remarkable effects of sputtering with cluster ions is surface smoothing. To understand its mechanism we have developed a computational model, which utilizes molecular dynamics (MD) to simulate rapid atomic collisions in the central impact zone, and a finite-difference method to account for processes occurring on a longer time scale over a wider target area. A case of gas cluster of a few hundred Ar atoms impacting a Cu target with energy up to 20 keV has been considered. The MD simulation has revealed that the atoms ejected from the surface have a significant lateral momentum component (parallel to the surface) which may have a major effect on surface morphology. Evolution of surface morphology under cluster ion irradiation was described by the modified Kuramoto-Sivashinsky equation. Comparison of the simulations with experimental data shows qualitative agreement.
| Original language | English |
|---|---|
| Pages (from-to) | 234-237 |
| Number of pages | 4 |
| Journal | Materials Chemistry and Physics |
| Volume | 54 |
| Issue number | 1-3 |
| Publication status | Published - Jul 1998 |
| Externally published | Yes |
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Keywords
- Cluster ions
- Impact
- Molecular dynamics
- Surface morphology
ASJC Scopus subject areas
- Materials Chemistry
Cite this
Sputterring and smoothing of metal surface with energetic gas cluster beams. / Insepov, Z.; Yamada, I.; Sosnowski, M.
In: Materials Chemistry and Physics, Vol. 54, No. 1-3, 07.1998, p. 234-237.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Sputterring and smoothing of metal surface with energetic gas cluster beams
AU - Insepov, Z.
AU - Yamada, I.
AU - Sosnowski, M.
PY - 1998/7
Y1 - 1998/7
N2 - Sputtering is a process of surface erosion by energetic ions. One of the remarkable effects of sputtering with cluster ions is surface smoothing. To understand its mechanism we have developed a computational model, which utilizes molecular dynamics (MD) to simulate rapid atomic collisions in the central impact zone, and a finite-difference method to account for processes occurring on a longer time scale over a wider target area. A case of gas cluster of a few hundred Ar atoms impacting a Cu target with energy up to 20 keV has been considered. The MD simulation has revealed that the atoms ejected from the surface have a significant lateral momentum component (parallel to the surface) which may have a major effect on surface morphology. Evolution of surface morphology under cluster ion irradiation was described by the modified Kuramoto-Sivashinsky equation. Comparison of the simulations with experimental data shows qualitative agreement.
AB - Sputtering is a process of surface erosion by energetic ions. One of the remarkable effects of sputtering with cluster ions is surface smoothing. To understand its mechanism we have developed a computational model, which utilizes molecular dynamics (MD) to simulate rapid atomic collisions in the central impact zone, and a finite-difference method to account for processes occurring on a longer time scale over a wider target area. A case of gas cluster of a few hundred Ar atoms impacting a Cu target with energy up to 20 keV has been considered. The MD simulation has revealed that the atoms ejected from the surface have a significant lateral momentum component (parallel to the surface) which may have a major effect on surface morphology. Evolution of surface morphology under cluster ion irradiation was described by the modified Kuramoto-Sivashinsky equation. Comparison of the simulations with experimental data shows qualitative agreement.
KW - Cluster ions
KW - Impact
KW - Molecular dynamics
KW - Surface morphology
UR - http://www.scopus.com/inward/record.url?scp=0032118059&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032118059&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0032118059
VL - 54
SP - 234
EP - 237
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
SN - 0254-0584
IS - 1-3
ER -