STM observation of HOPG surfaces irradiated with Ar cluster ions

T. Seki, T. Kaneko, D. Takeuchi, T. Aoki, J. Matsuo, Z. Insepov, I. Yamada

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

Cluster ion beams offer new surface modification processes because of their unique interaction between cluster atoms and solid surfaces. For example, surface smoothing and shallow implantation by cluster ion beam have been demonstrated. In order to reveal such cluster-surface interaction, a single trace formed by a cluster ion impact on a solid surface has been investigated using Scanning Tunneling Microscopy (STM). STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 Å were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.

Original languageEnglish
Pages (from-to)498-502
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume121
Issue number1-4
Publication statusPublished - Jan 1997
Externally publishedYes

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Graphite
Scanning tunneling microscopy
scanning tunneling microscopy
graphite
Ions
ions
Monomers
monomers
Atoms
Ion beams
solid surfaces
ion beams
atoms
ion impact
Surface treatment
craters
smoothing
surface reactions
implantation
Irradiation

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

STM observation of HOPG surfaces irradiated with Ar cluster ions. / Seki, T.; Kaneko, T.; Takeuchi, D.; Aoki, T.; Matsuo, J.; Insepov, Z.; Yamada, I.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 121, No. 1-4, 01.1997, p. 498-502.

Research output: Contribution to journalArticle

@article{edd46952cfe748a6aadd88ea14b52567,
title = "STM observation of HOPG surfaces irradiated with Ar cluster ions",
abstract = "Cluster ion beams offer new surface modification processes because of their unique interaction between cluster atoms and solid surfaces. For example, surface smoothing and shallow implantation by cluster ion beam have been demonstrated. In order to reveal such cluster-surface interaction, a single trace formed by a cluster ion impact on a solid surface has been investigated using Scanning Tunneling Microscopy (STM). STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 {\AA} were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.",
author = "T. Seki and T. Kaneko and D. Takeuchi and T. Aoki and J. Matsuo and Z. Insepov and I. Yamada",
year = "1997",
month = "1",
language = "English",
volume = "121",
pages = "498--502",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "1-4",

}

TY - JOUR

T1 - STM observation of HOPG surfaces irradiated with Ar cluster ions

AU - Seki, T.

AU - Kaneko, T.

AU - Takeuchi, D.

AU - Aoki, T.

AU - Matsuo, J.

AU - Insepov, Z.

AU - Yamada, I.

PY - 1997/1

Y1 - 1997/1

N2 - Cluster ion beams offer new surface modification processes because of their unique interaction between cluster atoms and solid surfaces. For example, surface smoothing and shallow implantation by cluster ion beam have been demonstrated. In order to reveal such cluster-surface interaction, a single trace formed by a cluster ion impact on a solid surface has been investigated using Scanning Tunneling Microscopy (STM). STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 Å were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.

AB - Cluster ion beams offer new surface modification processes because of their unique interaction between cluster atoms and solid surfaces. For example, surface smoothing and shallow implantation by cluster ion beam have been demonstrated. In order to reveal such cluster-surface interaction, a single trace formed by a cluster ion impact on a solid surface has been investigated using Scanning Tunneling Microscopy (STM). STM images of Highly Oriented Pyrolitic Graphite (HOPG) surfaces, were obtained after irradiation with 150 keV Ar cluster or 1.5 keV monomer ions. The 150 keV cluster ions, with a size of about 100 atoms, were used in comparison with 1.5 keV monomer ion. The velocity of an atom in each case was the same. In spite of these equal velocities, large craters with diameter of about 180 Å were observed in the STM image of cluster-irradiated HOPG surface, while only small hills were observed in monomer-irradiated surface.

UR - http://www.scopus.com/inward/record.url?scp=0031546222&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031546222&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031546222

VL - 121

SP - 498

EP - 502

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

ER -