Structural and photoluminescent properties of TiN thin films

M. N. Solovan; V. V. Brus; P. D. Maryanchuk; I. M. Fodchuk; V. M. Lorents; A. M. Sletov; M. M. Sletov; M. Gluba

doi:10.1134/S0030400X14110198

Structural and photoluminescent properties of TiN thin films

M. N. Solovan, V. V. Brus, P. D. Maryanchuk, I. M. Fodchuk, V. M. Lorents, A. M. Sletov, M. M. Sletov, M. Gluba

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Structural and photoluminescent properties of TiN thin films deposited by dc reactive magnetron sputtering are studied. It is found that TiN thin films are polycrystalline with a grain size of ∼15 nm and have a NaCl-type cubic crystal structure with a lattice constant of 0.42 nm. The TiN films under study exhibit photoluminescence in the spectral range h_ν ≈ 2.1–3.4 eV at 300 K.

Original language	English
Pages (from-to)	753-755
Number of pages	3
Journal	Optics and Spectroscopy (English translation of Optika i Spektroskopiya)
Volume	117
Issue number	5
DOIs	https://doi.org/10.1134/S0030400X14110198
Publication status	Published - 2014
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

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title = "Structural and photoluminescent properties of TiN thin films",

abstract = "Structural and photoluminescent properties of TiN thin films deposited by dc reactive magnetron sputtering are studied. It is found that TiN thin films are polycrystalline with a grain size of ∼15 nm and have a NaCl-type cubic crystal structure with a lattice constant of 0.42 nm. The TiN films under study exhibit photoluminescence in the spectral range hν ≈ 2.1–3.4 eV at 300 K.",

author = "Solovan, {M. N.} and Brus, {V. V.} and Maryanchuk, {P. D.} and Fodchuk, {I. M.} and Lorents, {V. M.} and Sletov, {A. M.} and Sletov, {M. M.} and M. Gluba",

year = "2014",

doi = "10.1134/S0030400X14110198",

language = "English",

volume = "117",

pages = "753--755",

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T1 - Structural and photoluminescent properties of TiN thin films

AU - Solovan, M. N.

AU - Brus, V. V.

AU - Maryanchuk, P. D.

AU - Fodchuk, I. M.

AU - Lorents, V. M.

AU - Sletov, A. M.

AU - Sletov, M. M.

AU - Gluba, M.

PY - 2014

Y1 - 2014

N2 - Structural and photoluminescent properties of TiN thin films deposited by dc reactive magnetron sputtering are studied. It is found that TiN thin films are polycrystalline with a grain size of ∼15 nm and have a NaCl-type cubic crystal structure with a lattice constant of 0.42 nm. The TiN films under study exhibit photoluminescence in the spectral range hν ≈ 2.1–3.4 eV at 300 K.

AB - Structural and photoluminescent properties of TiN thin films deposited by dc reactive magnetron sputtering are studied. It is found that TiN thin films are polycrystalline with a grain size of ∼15 nm and have a NaCl-type cubic crystal structure with a lattice constant of 0.42 nm. The TiN films under study exhibit photoluminescence in the spectral range hν ≈ 2.1–3.4 eV at 300 K.

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U2 - 10.1134/S0030400X14110198

DO - 10.1134/S0030400X14110198

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JO - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

JF - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

SN - 0030-400X

IS - 5

ER -

Structural and photoluminescent properties of TiN thin films

Abstract

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