Structural modification in reactive-ion-etched i-InP and n+-InP studied by Raman scattering

J. E. Maslar, P. W. Bohn, D. G. Ballegeer, E. Andideh, I. Adesida, C. Caneau, R. Bhat

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

Structural and electrical property modifications in i-InP and n +-InP by reactive ion etching have been characterized by using Raman scattering to observe changes in the positions and intensities of intrinsic phonons and coupled phonon-plasmon bands. Different etch gas compositions (Ar, He, CH4/H2, CH4/Ar, CH4/He, and CH4/H2/Ar), bias potentials (0-500 V), and etch times were examined. Electrical property changes were followed by correlating results with a one-sided abrupt junction model. Ar and He, which interact with the material by physical sputtering processes, were found to induce the greatest structural and electrical modifications. Ar-etched samples exhibited the greatest structural modification, with evidence of structural damage coming from far beyond the calculated penetration depth of low-energy Ar+, while samples etched in methane-based plasmas showed very little structural perturbation. Etching in all of the gas mixtures used produced some degree of electrical modification in n+-InP, with He plasmas causing the most significant changes. In general, samples etched with lower ion energies and sputter components exhibited the least structural and electrical modification.

Original languageEnglish
Pages (from-to)2983-2994
Number of pages12
JournalJournal of Applied Physics
Volume73
Issue number6
DOIs
Publication statusPublished - Dec 1 1993
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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