Structure and corrosion properties of thin TiO 2 films obtained by magnetron sputtering

A. Kozlovskiy, I. Shlimas, K. Dukenbayev, M. Zdorovets

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10 Citations (Scopus)

Abstract

The paper presents results of preparation and investigation of thin films based on TiO2 using the method of magnetron sputtering. It was established that samples obtained are polycrystalline structures with a TiO 2 phase, characteristic of brookite with a high degree of crystallinity and texturing. It has been established that an increase in the thickness of films from 220 to 640 and 720 nm leads to the enlargement of crystallites and a change in films density, due to processes of crystallization and nucleation during the deposition process. It is determined that an increase in coating thickness leads to an increase in hardness and strength, which is caused by a change in the crystal structure and a decrease in amorphous inclusions. It is shown that the use of TiO 2 -based thin films with a given thickness can significantly increase the corrosion resistance of stainless steel and reduce the rate of surface degradation.

Original languageEnglish
Pages (from-to)224-232
Number of pages9
JournalVacuum
Volume164
DOIs
Publication statusPublished - Jun 1 2019

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Keywords

  • Anti-corrosion coatings
  • Crystal structure
  • Magnetron sputtering
  • Thin films
  • Titanium dioxide

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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