Study of laser-debonded GaN light emitting diodes

C. P. Chan, T. M. Yue, C. Surya, A. M.C. Ng, A. B. Djurišić, C. K. Liu, M. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report experimental investigation of laser-assisted debonding of GaN-based light emitting diodes (LEDs) grown by metalorganic chemical vapor deposition (MOCVD) on sapphire substrates. The sapphire substrate was debonded from the GaN material using an excimer laser. The unintentionally doped GaN surface was photo-electrochemically (PEC) etched to form hexagonal pyramid hillocks on the surface, using HeCd laser as the light source. The luminous intensities of the debonded and roughened LEDs at different etching time, as a function of different surface roughness, have been reported. In this experiment, the greatest improvement in the luminous intensities has been achieved at 40mins etching and increased by 60% when compared to the LEDs on sapphire. This increase is attributed to the enhancement in photon extraction efficiency.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages257-262
Number of pages6
Volume892
Publication statusPublished - May 15 2006
Externally publishedYes
Event2005 Materials Research Society Fall Meeting - Boston, MA, United States
Duration: Nov 28 2005Dec 2 2005

Conference

Conference2005 Materials Research Society Fall Meeting
CountryUnited States
CityBoston, MA
Period11/28/0512/2/05

Fingerprint

Aluminum Oxide
Sapphire
Light emitting diodes
sapphire
light emitting diodes
luminous intensity
Lasers
Etching
etching
lasers
Debonding
Metallorganic chemical vapor deposition
Excimer lasers
Substrates
pyramids
excimer lasers
metalorganic chemical vapor deposition
Light sources
light sources
surface roughness

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Chan, C. P., Yue, T. M., Surya, C., Ng, A. M. C., Djurišić, A. B., Liu, C. K., & Li, M. (2006). Study of laser-debonded GaN light emitting diodes. In Materials Research Society Symposium Proceedings (Vol. 892, pp. 257-262)

Study of laser-debonded GaN light emitting diodes. / Chan, C. P.; Yue, T. M.; Surya, C.; Ng, A. M.C.; Djurišić, A. B.; Liu, C. K.; Li, M.

Materials Research Society Symposium Proceedings. Vol. 892 2006. p. 257-262.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chan, CP, Yue, TM, Surya, C, Ng, AMC, Djurišić, AB, Liu, CK & Li, M 2006, Study of laser-debonded GaN light emitting diodes. in Materials Research Society Symposium Proceedings. vol. 892, pp. 257-262, 2005 Materials Research Society Fall Meeting, Boston, MA, United States, 11/28/05.
Chan CP, Yue TM, Surya C, Ng AMC, Djurišić AB, Liu CK et al. Study of laser-debonded GaN light emitting diodes. In Materials Research Society Symposium Proceedings. Vol. 892. 2006. p. 257-262
Chan, C. P. ; Yue, T. M. ; Surya, C. ; Ng, A. M.C. ; Djurišić, A. B. ; Liu, C. K. ; Li, M. / Study of laser-debonded GaN light emitting diodes. Materials Research Society Symposium Proceedings. Vol. 892 2006. pp. 257-262
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